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Defects and Disorders in Semiconductors

Defects and Disorders in Semiconductors. Jermell Powell ECE 423 11/15/06. Defect types. Point defects Line defects Area defects Cluster defects. Point defects. Types Frenkel defect pair. Line defects. Example. Wide defects. Area defect Epitaxial mound Cluster defect Dust particle

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Defects and Disorders in Semiconductors

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  1. Defects and Disorders in Semiconductors Jermell Powell ECE 423 11/15/06

  2. Defect types • Point defects • Line defects • Area defects • Cluster defects

  3. Point defects • Types • Frenkel defect pair

  4. Line defects • Example

  5. Wide defects • Area defect • Epitaxial mound • Cluster defect • Dust particle • Mask scratch

  6. Defect density • d(r) = d{1 + 2.5 exp [0.34 X 19(1 - r/R)]}

  7. Causes of defects • Semiconductor doping • Czochralski method

  8. Advanced defects • Antisite • Nonstoichiometric • Void defects

  9. Divacancy • Cause • Effect • V-V + Isi -> V-V + Isi • V-V + Isi -> V • V-V + 2Isi -> V-V + 2Isi • V-V + 2Isi -> V + Isi • V-V + 2Isi -> 0

  10. Results • Positive • Oxygen in Silicon • Lifetimes • Diffusion lengths • Mobilities • Solar cells, IC

  11. ZnTe and CdTe • Chlorine doping • Copper doping • GaAs, Arsenic heavy

  12. Detrimental • Categories of Inoperability • Oxygen in Silicon • Dielectric breakdown

  13. Questions? • Thank you

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