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ISMI Next Generation Factory Program Briefing

SEMICON West 2008. ISMI Next Generation Factory Program Briefing. Olaf Rothe NGF Program Manager July 14, 2008. Outline. NGF Program overview NGF Guidelines priorities Overall productivity and cost goals Productivity modeling and metrics Outlook 2009 and Beyond Key messages.

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ISMI Next Generation Factory Program Briefing

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  1. SEMICON West 2008 ISMI Next Generation FactoryProgram Briefing Olaf Rothe NGF Program Manager July 14, 2008

  2. Outline • NGF Program overview • NGF Guidelines priorities • Overall productivity and cost goals • Productivity modeling and metrics • Outlook 2009 and Beyond • Key messages

  3. ISMI NGF Program Mission • Continuously refine, communicate and realize the next generation factory vision and “19 point Factory Guidelines” • Address global and infrastructure aspects of both hardware and software development, targeting new capabilities in equipment and factory productivity • Enable retrofit of both new and improved capabilities into existing 200 and 300mm factories as a high priority • Integrate a step-wise and coordinated waste reduction approach to realize equipment and factory productivity improvements targets • Provide a complementary forward-compatible approach of 300mm NGF to 450mm to address the needs of our various member constituencies and minimize the R&D expenditure by the industry • Deliver NGF productivity improvements by 2012, in accordance with the ITRS, to realize the necessary cycle time and cost reduction and to stay on Moore’s Law

  4. ISMI NGF 2008 Program Objectives • Key supplier engagement and coordination for major equipment improvement • First Wafer Delay, Availability & Predictability, Quality Data Access and Usage • Identify requirements to implement small lot manufacturing and single wafer processing • Identify productivity improvements necessary to implement fully continuous processing • Address requirements for advanced material delivery and factory control systems to take full advantage of the equipment/factory productivity improvements

  5. ISMI NGF Program Overview NGF Target for 2012 centered at - 50% Cycle Time Reduction - 30% Cost Reduction ITRS, Moore’s Law, IDM Requirements ISMI CIP 19 Point Guidelines NPW FWD ISMI NGF Program SLS What Else ? EEQA ECM EDA PPM VM DQ

  6. Maximum 450mm carrier capacity and specification for early prototypes • Front Opening 450mm wafer carriers • Carriers designed for efficient purging with standardized purge locations • MHS Design to assume infrequent, anomaly manual handling only • Design allowing automated reticle transport • Standardized interfaces - equipment mainframe: process chambers • Standardized locations for low-cost buffers on tools (beyond loadports) • Equipment to be Predictive Maintenance friendly • Equipment maintenance and operation in parallel • “Smart Idle” mode for equipment • Facility adaptor plates • Equipment first wafer delay reduction • Single Wafer or Mini-batch (vs. Batch) processing tools • Equipment design for flexible capacity increments • Enable continuous processing of material • Wafer-level instruction at any time before processing • Single Point of Control for factory system command/control • Equipment to provide quality data to enable external monitoring • Carrier: Slot integrity flexibility 450 only PPM SLS MED LOW EDA LOW LOW DQ HIGH HIGH VM MED LOW HIGH EEQA MED MED ECM HIGH MED FWD MED HIGH MED 19 Point Guidelines and NGF Projects • Member company prioritization in 2007 • Supplier perspective on priorities • Very good correlation Equipment Centric

  7. Minimized Cycle Time and Cost Equipment Availability & Predictability Factory Predictability Advanced Material Control & Delivery NGF Strategic Outlook 2009 – 2013 2008 2009 2010 2011 2012 2013 Cost and Cycle Time Improvement Strategies ) Advanced Factory System Command & Control Projects

  8. SEMICON West 2008 2008 Results – Metrics & Simulation

  9. Metrics and target definition Collaboration with the Joint Productivity Working Group in Metrics, Simulation & Economics • Metrics breakdown for Cycle Time and Cost • Common metrics definition • Identification of productivity contributors Metrics Breakdown • Top down quantification of improvement for each metric using simulation guidance • ISMI Projects: PPM, EEQA, ECM, FWD • Target definition • Measurement of results • Bottom up feasibility verification

  10. Metrics Targets Contributors PPM EEQA Cycle Time ECM DQ EDA Cost FWD SLS VM ?? ?? Productivity and Cost Goals Breakdown Approach Equipment Metrics Availability……………………….xx% Predictability ……………………xx% … … Setup Time / FWD MTTR Time to diagnose MTBF Parts delivery Unscheduled to scheduled downtime Variance of Repair Deterministic PM …. Cost Modeling and Factory Simulation Factory Metrics Utilization………………………..xx% WIP………………………………xx% Capacity………………………....xx% … … … AMHS predictability Mean delivery time Scheduling & dispatch cascading Chamber dedication Downtime predictability Single wafer manufacturing NPW Small Lot Size …. Cost Metrics Fixed…………………………….xx% Variable…………………………xx% Depreciation Maintenance Fab Capacity Materials NPW Labor ….

  11. Productivity and Cost Goals - Targets Cost Modeling and Factory Simulation Cycle Time Option

  12. Cycle Time Reduction Cycle Time vs Wafer Cost Change 25% 20% ISMI NGF Program High Mix Baseline (712 tools) 15% 10% Increased Benefit for NGF High Mix with additional Cascading and NPW Initiatives 5% 0% * -5% Wafer Cost Change * -10% Similar Benefit for NGF High Mix with SWP/SLS & +5%EA, +25% FWD -15% Wafer Cost Reduction -20% -25% -30% ISMI NGF Program Target in accordance with ITRS -35% -40% -70% -65% -60% -55% -50% -45% -40% -35% -30% -25% -20% -15% -10% -5% 0% 5% Cycle Time Change 300mm NGF Program Addendum Currently identified opportunities of improvement Further refinement and investigation underway

  13. SEMICON West 2008 2009 Outlook and Beyond

  14. Outlook 2009 and Beyond Improved equipment productivity, lower cycle time, small lot size and single wafer manufacturing require significant Factory Operations Improvements to leverage their full benefit • Equipment Availability & Predictability • Continued focus on equipment productivity improvement • PPM, EEQA, EDA/DQ • Supplier pilots, factory integration & solutions • Factory Predictability • Advanced Material Control & Delivery • Advanced Factory System Command & Control • Investigate productivity improvement areas in factory operations • Cascading • AMHS • Scheduling & Dispatch • Decision support systems • Network communications for command & control • Equipment changes related to areas above

  15. Manufacturing improvement and waste reduction • How to improve waste reduction activity? • One reduction brings about many effects! • One effect needs many efforts for waste reduction! Waste of equipment utilization Waste of maintenance Waste of poor achievement of product performance Waste of order fulfillment delay Waste of over production Waste of material over consumption Stabilization of Equipment OEE Improvement Variation control for fine pattern Cycle time reduction Material expense reduction Yield enhancement This slide by courtesy of NEC

  16. SEMICON West 2008 NGF Key Messages

  17. NGF Key Messages • ISMI NGF target remains 50% cycle time and 30% cost improvement • NGF program has identified more productivity improvement opportunities, enabling both cycle time and cost improvements at the same time • Equipment productivity improvement projects have progressed to a stage of active supplier engagement (ECM, FWD, PPM, EEQA) • PPM embraced as currently most promising project, with EDA/DQ usage by suppliers and IDM’s as fundamental enabler • Testing of software and EDA functionalities critical for enabling and implementation of new NGF capabilities

  18. NGF Key Messages • With continued focus on equipment productivity improvements ISMI addresses factory operations and environment as next step • Approach to waste reduction becomes a strategic part of productivity improvement • Retrofit of new capabilities into existing factories highly desirable • Continued communication and collaboration with suppliers and IDM’s; the identification of additional leverages will enable further productivity improvements beyond the reported results

  19. For more Information… This presentation material will be made available for download at the SEMATECH public website: www.ismi.sematech.org Meetings and News – Past Meeting Proceedings – ISMI Industry Briefings To initiate individual discussions with the ISMI Team, please contact: • Olaf Rothe, NGF Program Manager (olaf.rothe@ismi.sematech.org) • Brad Van Eck, NGFR Project Manager (brad.van.eck@ismi.sematech.org)

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