Concept of Precision Motion Control System

1. Concept of Precision Motion Control System Precision Linear Stage Travel Distances

2. The precision motion control system is made up of three standard components such as a controller, a drive, and a motor. In general, it is used in a wide variety of applications, but the majority of industries use it for semiconductor manufacturing and generate the power in machines.

3. Types of Precision Motion Control Stages Many types of precision motion control stages are given below: • Precision Motion Control Linear Stage When it comes to accomplishing the versatility, complete repeatable actions, and integrate the multi-axis X-Y-Z stages, the linear stage precision motion control is highly used in the laboratories. Some top-notch features of linear stages are as follow:

4. Safe operations with real-time force sensing. • Smooth and responsive activities for connecting the backlash. • Contactless read-head design for removing the leakage currents. • EMos to stop the motion instantly. • No initialization of the device is needed to reboot after EMO. • Silent operations and fully heat-proof equipment. • Simple to use control structure. • There is no need for the adjustment of PID parameters to obtain the super-fast performance. • It comes in a resolution of 25nm, 50nm, and 100nm. • It features bi-directional repeatability of 50nm to 200 nm. • Quick acceleration from 0.001 to 0.25g. • Range of velocities - 0.01 μm / s to 100 mm / s with maximum speed of 200 mm/sec. • Sequential travel times.

5. Precision Motion Control Rotary Stage Motor The precision motorized rotary stage quickly solves the need for precision motion control. Though it delivers high performance and ensures long-lasting operations, it can be either used individually or combined with the X-Y-Z-Θ stage, X-Y-Θ systems.

6. Salient Features of Motorized Rotary Stage • Hysteresis elimination is possible with the read-head design. • Soft limit programming with force sensing real-time techniques. • Backlash can be easily linked with the constant movements. • No restart needed with EMO. • Ultra-silent operation and free from excessive heat. • Mechanical controls to gain step-and-settle performance. • Flexible command structure with 0.0003 degrees of resolution. • 0.0006-degree bi-directional repeatability, 20 µrad wobbles, and 0.003 to 200 degree-celsius velocity range can alone be provided by the precision motion control motorized rotary stage.

7. The 33LR Integrated X, Y, Θ Precision Motion Control Stage 33LR integration X, Y, Θ is another the best precision motion control stage which can automate the machine working, plus provides you superior performance all the time. It is incorporated with the precision stage rotatory technology and precision single-axis linear stage to fulfill the need of many applications, which specifically require the X, Y, Θ

8. Advantages of Using The 33LR Integrated X, Y, Θ • 80mm of XY travel distance with 0.75 um TIR flatness from each axis. • 360 degree continuous and faster movements without producing high sound. • 50,100,200 nm linear and 0.0006 degree rotatory bi-directional option. • It has a non-contacting read-head elegant design to remove the hysteresis. • There is no hassle of restarting the system after the EMO. • It assures safe operations with digital sensing methods.

10. CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com Service - Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130 www.kensingtonlabs.com Our Toll Free Number 1-888-977-7800