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Oerlikon Solar’s path to grid parity Solar Plaza, 11.June Munich Gerold Büchel, Director PECVD

Oerlikon Solar’s path to grid parity Solar Plaza, 11.June Munich Gerold Büchel, Director PECVD. Solutions for a solar powered world. Introduction to Oerlikon Grid parity on the horizon Leading thin film technology End-to-End manufacturing solution. Oerlikon group at a glance.

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Oerlikon Solar’s path to grid parity Solar Plaza, 11.June Munich Gerold Büchel, Director PECVD

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  1. Oerlikon Solar’s path to grid paritySolar Plaza, 11.June MunichGerold Büchel, Director PECVD

  2. Solutions for a solar powered world • Introduction to Oerlikon • Grid parity on the horizon • Leading thin film technology • End-to-End manufacturing solution Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  3. Oerlikon group at a glance • 5.6 billion CHF revenue in 2007 • 19,750 employees worldwide • 2500 global support • 1500 scientist and engineers • 35 countries • 170 global locations • 270 million CHF R&D investment in 2007 • 6700 living patents Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  4. Oerlikon Solar Oerlikon Solar - Key member of the Oerlikon group Oerlikon Drive Systems Oerlikon Components Oerlikon Vacuum Oerlikon Textile Oerlikon Coating Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  5. It all started 14 years ago at the University of Neuchatel (Oerlikon Solar cooperation partner)… • 1994 1st WCPEC Hawaii • Johannes Meier – Head of R&D Neuchâtel Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  6. Oerlikon Solar as first mover in thin film silicon Product Milestones R&D Lab opening by Dr. J. Meier and Dr. U. Kroll 1.4m2 R&D equipment delivered to Schott Solar 40 MWp equipment contract with Schott Solar 40 MWp front end line contract with ERSOL Several contracts for end-to-end solutions First Micromorph production line contract First Micromorph production line ramp-up 2003 2004 2006 2006 2007 2007 2008-2009 Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  7. Our mission To be the leading supplier of product and fabsolutions for the PV manufacturing industry - Equipment and processes - Process integration and ramp-up - Guaranteed performance Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  8. Solutions for a solar powered world • Introduction to Oerlikon • Grid parity on the horizon • Leading thin film technology • End-to-End manufacturing solution Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  9. PV electricity cost in California $/kWh Grid price increasing by 2-3.5% p.a. PV generation cost downside PV electricity cost in Spain PV generation cost upside $/kWh Grid price increasing by 2-3.5% p.a. PV generation cost downside PV generation cost upside ~6kW/m2 per day solar irradiance assumedSource: Oerlikon analyst reports Grid parity for PV in California and Spain Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  10. Grid Parity – Lowering the cost per watt Total Cost Throughput x Power $ Wp = High Efficiency Micromorph Tandem Solar Modules Proven Turnkey Solutions Oerlikon Advantage Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  11. Path to Grid Parity –Oerlikon Leading Technology Fab nominal capacity Module efficiency GW/p 13% 12% 1 11% 0.3 capacity 10% 0.12 9% 0.08 Micromorph® Tandem 8% 0.04 Next Generation Thin-Film MicromorphTandem 7% Amorph 2006 2007 2008 2009 2010 2011 2012 2006 2007 2008 2009 2010 2011 2012 CapEx per Watt Cost of ownership $/Wp $/W 1.5 2007 for 20 MWp fabs < 1.5 $/Wp (<1.12€*/Wp) 4.00 3.50 Grid Parity 1.0 3.00 2.50 GigaCampus 2010 for GWp fabs < 0.7 $/Wp (<0.52€*/Wp) 2.00 0.5 1.50 2012 2010 2007 2008 2009 2011 2012 2007 2008 2009 2010 2006 Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza (Calculated with an exchange rate of €1.00 =$1.34)

  12. Solutions for a solar powered world • Introduction to Oerlikon • Grid parity on the horizon • Leading thin film technology • End-to-End manufacturing solution Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  13. a-Si a-Si µC-Si Amorph Single Junction Micromorph Tandem Junction Technology - From amorph to micromorph Tandem a-Si:H mc-Si:H Visible Near IR Amorph Up to 50% more energy absorbed Micromorph Tandem Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  14. TCO1200 KAI1200 LSS1200 Proven core equipment technology... Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  15. Clean Laser PECVD Laser Laser Assembly TCO 1200 - Higher efficiency and lower CoO • Proprietary LPCVD technology • High electrical conductivity to avoid losses • High transparency to minimize absorption • Transparent conductor deposition and tunable texturing in a single step • No wet etch step required • Integral to Micromorph process • High transmission in visible and near IR light spectrums • Thinnest bottom cell due to improved haze TCO 1200 TCO TCO a-Si/µc-Si Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  16. Clean Laser PECVD Laser Laser Assembly TCO 1200 - Higher efficiency and lower CoO The principle of light trapping TCO 1200 TCO TCO a-Si/µc-Si Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  17. 250 µm LSS 1200 Clean TCO PECVD TCO Assembly LSS 1200 - Efficient and reproducible Laser scribing • Production proven thin film PV Laser scribing system • Excellent linearity and precision • Narrow scribe lines • Reliable, stable platform • Result • Minimal PV area removal for more power per modules • High throughput using multiple beam concept • More than 20 systems in production Laser Laser Laser a-Si/µc-Si Pattern 1 Pattern 2 Pattern 3 Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  18. KAI 1200 Clean TCO Laser Laser TCO Laser Assembly KAI 1200 - Proven product for PV layers • KAI 1200 with Plasma Box® reactor • 40 MHz for highest rate and quality • 28m2 of 40 MHz deposition area • Amorph & microcrystaline PIN layers • Single chamber processing • insitu-clean after every step • Result • Proved best in class TF silicon modules • High throughput • High system flexibility & utilization <10% uniformity PECVD a-Si/µc-Si Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  19. Micromorph module on 1.4m2Using commercial reactor Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  20. Module installation at Oerlikon Solar in Switzerland Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  21. Solutions for a solar powered world • Introduction to Oerlikon • Grid parity on the horizon • Leading thin film technology • End-to-End manufacturing solution Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  22. Clean TCO FC TCO FC Laser Laser Clean PECVD PECVD Laser TCO BC TCO BC Laser Laser Laser Front-End Line Automation Contacted Tested Device Encapsulation-Lamination Voc Contact White Reflector Flasher Cross Contact Lamination Flasher Back-End End-to-End Solution Oerlikon Proprietary Partners End-to-End production solutions a-Si/ µ-Si Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  23. Processupdates Yield improvement Up-time improvement Tact-time improvement Module power tuning …followedby process integration and production ramp-up Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  24. SOP guaranteed starting condition on fab capacity and module power 1 guaranteed cumulated output per phase 2 Guaranteed full production fab capacity and module power Production ramp-up e.g. 60MW micromorph for illustration purpose only, output curve depending on project schedule Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  25. Conclusion • Oerlikon has successfully transferred R&D results into mass production • First customers delivering certified thin-film silicon solar modules since Q3/2007 • With a proven end-to-end production solution fastest time to money. • Oerlikon customers of Micromorph Tandem Technology going mass production in 2008 • On track to achieve grid parity by 2010 • Strong commitment on achieving 0.54€/Wp thin film silicon module production cost in 2010 Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

  26. Thin-Film Silicon mass production – A reality, here and now Thank you ! Oerlikon Solar/ CONFIDENTIAL/ Solar Plaza

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