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7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane) Passivation layer (e.g. SiO 2 , Si 3 N 4 , LPCVD Si 3 N 4 on top of SiO 2 )

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580 views • 18 slides
7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane) Passivation layer (e.g. SiO 2 , Si 3 N 4 , LPCVD Si 3 N 4 on top of SiO 2 )

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470 views • 18 slides
Surface Micromachining

Surface Micromachining

Surface Micromachining. Dr. Marc Madou, Fall 2012, UCI Class 10. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane)

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896 views • 18 slides
7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120

7. Surface Micromachining Fall 2013 Prof. Marc Madou MSTB 120. L m. Photoresist. Lm + 2t SiO2. Surface Micromachining. n +. Basic Process Sequence (poly-Si). Blanket n + diffusion of Si substrate (ground plane) Passivation layer (e.g. SiO 2 , Si 3 N 4 , LPCVD Si 3 N 4 on top of SiO 2 )

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202 views • 18 slides
Fabrication of Poly-Si TFT on Flexible Thin Glass Substrate

Fabrication of Poly-Si TFT on Flexible Thin Glass Substrate

Fabrication of Poly-Si TFT on Flexible Thin Glass Substrate. Yoochul Jung, Sunghwan Won, D.G. Ast (Cornell University, Dep. of Mat. Sci. Eng) 2006.06.28. Outline. Motivation Comparison of Polymer and Glass substrates. Processing of Pocket Fabrication

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390 views • 14 slides

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