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Iowa state university optical - PowerPoint PPT Presentation

PLASMA ETCHING OF EXTREMELY HIGH ASPECT RATIO FEATURES: TWISTING EFFECTS*

PLASMA ETCHING OF EXTREMELY HIGH ASPECT RATIO FEATURES: TWISTING EFFECTS* Mingmei Wang a) , Ankur Agarwal b) , Yang Yang a) and Mark J. Kushner a) a) Iowa State University, Ames, IA 50011, USA mmwang@iastate.edu mjk@iastate.edu b) University of Illinois, Urbana, IL 61801, USA

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1.24k views • 27 slides

NUMERICAL INVESTIGATION OF WAVE EFFECTS IN HIGH-FREQUENCY CAPACITIVELY COUPLED PLASMAS*

NUMERICAL INVESTIGATION OF WAVE EFFECTS IN HIGH-FREQUENCY CAPACITIVELY COUPLED PLASMAS* Yang Yang and Mark J. Kushner Department of Electrical and Computer Engineering Iowa State University, Ames, IA 50011 yangying@iastate.edu mjk@iastate.edu http://uigelz.ece.iastate.edu October 2007.

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367 views • 23 slides

OPTIMIZING THE PERFORMANCE OF PLASMA BASED MICROTHRUSTERS*

OPTIMIZING THE PERFORMANCE OF PLASMA BASED MICROTHRUSTERS* Ramesh A. Arakoni, a) J. J. Ewing b) and Mark J. Kushner c) a) Dept. Aerospace Engineering University of Illinois, Urbana, IL b) Ewing Technology Associates, Bellevue, WA c) Dept. Electrical and Computer Engineering

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347 views • 22 slides

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Iowa state university optical - PowerPoint PPT Presentation

PLASMA ETCHING OF EXTREMELY HIGH ASPECT RATIO FEATURES: TWISTING EFFECTS*

NUMERICAL INVESTIGATION OF WAVE EFFECTS IN HIGH-FREQUENCY CAPACITIVELY COUPLED PLASMAS*

OPTIMIZING THE PERFORMANCE OF PLASMA BASED MICROTHRUSTERS*