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Plasma sources science - PowerPoint PPT Presentation

Plasmas are essential for making computer chips

SHEATH. Plasmas are essential for making computer chips. For instance, for etching 60 nm features. UCLA. Etch rate is greatly enhanced by ions. UCLA. Why use radiofrequency power?. DC discharges: low density, internal electrodes

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1.25k views • 83 slides

Types of RF plasma sources

UCLA. Types of RF plasma sources. Old RIE parallel plate etcher (GEC reference cell) Inductively coupled plasmas (ICPs) New dual frequency capacitively coupled plasmas (CCPs) Helicon wave sources (HWS). UCLA. Schematic of a capacitive discharge. UCLA. The GEC Reference Cell.

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1.14k views • 61 slides

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Plasma sources science - PowerPoint PPT Presentation

Plasmas are essential for making computer chips

Types of RF plasma sources