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Laser application in mems

outline . IntroductionFabricationLaser assisted in fabrication mems structureLaser assisted in assembly mems moving part. introduction. The term MEMS first started being used in the 1980's. It is used primarily in the United States and is applied to a broad set of technologies with the goal o

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Laser application in mems

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    1. Laser application in mems babak manafi June.09,2009

    2. outline Introduction Fabrication Laser assisted in fabrication mems structure Laser assisted in assembly mems moving part

    3. introduction The term MEMS first started being used in the 1980’s. It is used primarily in the United States and is applied to a broad set of technologies with the goal of miniaturizing systems through the integration of functions into small packages

    4. The name of Micro Systems US: MEMS (MicroElectroMechanical Systems) Japan: Micromachines Europe: MST (Micro System Technology) Scale of device: roughly from 1µm-1mm.

    5. The graphic shows some of the variety found in MEMs systems Micro-pump – used to pump small amounts of fluid Micro-gear – this is a SEM (Scanning Electron Micrograph) of a Sandia Gear, each tooth is about 8um or the size of a human red blood cell Micro-mirror – used in telecommunications and also displays, one example here. Fluid Channel – well, if you have a micro pump, you need a fluid channel

    7. The Scale of Things – Nanometers and More

    9. MEMS in Our Life

    10. MEMS in Our Life

    11. Applications: Actuators Texas Instruments Digital Micromirror DeviceTM

    12. 12 Micro-Motor and Micro-Mirror

    16. Spider mite standing on electrostatic micro engine

    17. Spider mite walking across MEMs device

    20. Close-up of gears

    21. 21 Penetrating Neural Probe

    23. 23 Sandia’s micro mechanical lock

    26. Summary: Applications 3 main classes of MEMS Passive structures Sensors Actuators Passive structures Microreservoirs (injet printer nozzle) Micro-channels (microfluidics) Sensors Pressure sensors Inertial sensors Actuators Digital micromirrors (projection) Gears, transmissions, motors, pumps, valves

    27. How Use of micro mirror in mems

    29. Basic microfabrication technologies Deposition Chemical vapor deposition (CVD/PECVD/LPCVD) Epitaxy Oxidation Evaporation Sputtering Spin-on methods Etching Wet chemical etching Istropic Anisotropic Dry etching Plasma etch Reactive Ion etch (RIE, DRIE) Patterning Optical lithography X-ray lithography

    30. I discuss the use of excimer lasers in the manufacture of electromechanical devices and systems with emphasis on two application areas: laser micromachining of plymer masters for replication in metal by electroplating (laser-LIGA) laser-assisted manipulation of microparts for hybrid assembly.

    31. Over the past twenty years a large number of laser-based fabrication techniques have been developed. These include: laser micromachining Laser assisted chemical etching (LCE or LACE) Laser-assisted chemical vapour deposition (LCVD) Pulsed laser deposition processes

    32. 32 Laser-assisted Chemical Deposition Chemical deposition from vapor phase by laser-assisting Laser Nd-YAG (neodymium yttrium aluminum garnet) or Ar+ Substrates - silicon - carbon - boron - oxides - nitrides - carbides - borides - metals

    33. LASER-LIGA PROCESS

    34. Fabrication microturbine

    36. SEM image of micro turbine rotor (dia 470µm, height 150µm) In this process excimer laser have 193 nm wave length

    38. In the following figures show the sequence of fabrication micro turbine

    42. Measurement represent 0.14ms intervals of the 2.2ms thermal cycle

    43. Laser assisted assembly

    48. Special thank for : Reza Ghodssi Associate Professor ISR and the Electrical and Computer Engineering Department 2236 Kim Bldg. University of Maryland College Park, MD 20742 University of boston Veeco instruments inc. 2650 E.Elvira road tucson, AZ 85706 USA visit www.veeco.com

    49. Reffrences: A. Gillner et al.: Proc. ICALEO 2000 Laser Microfab. Conf., Dearborn, USA, 2000-10 (Laser Institute of America, 2000), p. B1. Laser processes for MEMS manufacture, Andrew S. Holmes* Department of Electrical and Electronic Engineering, Imperial College of Science, Technology and Medicine, UK

    50. Simulating RF MEMS , David Bindel ,UC Berkeley, CS Division MEMS TUNABLE DUAL-WAVELENGTH LASER WITH LARGE TUNING RANGE , H. Cai1, X. M. Zhang1, J. Wu2, D. Y. Tang1, Q. X. Zhang3, and A. Q. Liu11School of Electrical & Electronic Engineering, Nanyang Technological University, SINGAPORE , 2Key Laboratory of OCLT, MoE, Beijing University of Posts and Telecommunications, CHINA 3Institute for Microelectronics, SINGAPORE

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