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April 2012 Summary for Plenary

April 2012 Summary for Plenary . Abraham Arceo ( Sematech ) Arnaud Favre ( adixen ) Herve Fontaine (CEA Leti ) Guillaume Gallet ( Camfil Farr ) Astrid Gettel ( GlobalFoundries ) Jost Kames ( artemis control) Slava Libman ( Balazs NanoAnalysis , Air Liquide)

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April 2012 Summary for Plenary

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  1. April 2012 Summary for Plenary Abraham Arceo (Sematech) Arnaud Favre (adixen) HerveFontaine (CEA Leti) Guillaume Gallet(CamfilFarr) Astrid Gettel (GlobalFoundries) Jost Kames (artemis control) SlavaLibman (Balazs NanoAnalysis, Air Liquide) Andreas Neuber (AMAT) Lothar Pfitzner (Fraunhofer IISB) KoichiroSaga (Sony Corporation)

  2. APRIL 2012 Summary for Plenary Discussion of the agenda and of the structure of YE/CIA (characterization, inspection, analysis) Presentation of “Predictive Sampling” YE Roadmap for More-than-Moore Discussion of need of YL for 450mm Telecon with Japanese YE: Discussion of the scope of the chapter on CIA • Potential new tables and key challenges • It is obvious that contributors with product engineering related expertise are the key to design the new meaningful tables / requirements. JEITA will start the activity with contributors from the other areas. • CIA @ Process, Device, Chip, System Level • Confirmation of collaboration on the new structure • Assignment of YE subchapter: scope of work is defined as follows: • WECC around wafer /above wafer issues • CIA tool specification on the wafer /in the wafer issues Based on this, CIA may include the device/chip/system level issue Requirements of PFA (Physical Failure Analysis) will be discussed later Alignment of WECC approach Cross-TWG Meetings:, Litho, Metrology, FEP, A&P, Factory, Interconnect

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