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BioMEMS Chapter 1 Introduction

BioMEMS Chapter 1 Introduction. 1-1 微電子的歷史發展. 遵循莫非定律( Moore ’ s law ). 1-2 微感測器演進. 感測器: 致動器: 換能器(傳感器):. IC 與傳感器的市場比較. 感測器的應用範圍:. 1-3 MEMS 演進. MEMS 的發展目標: 較成熟的 MEMS 例子:. MST 技術 有競爭力的技術特色:. MEMS 的市場. 1-4  微機械. MEMS 技術的挑戰: 微機械: 相關技術.

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BioMEMS Chapter 1 Introduction

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  1. BioMEMS Chapter 1 Introduction

  2. 1-1 微電子的歷史發展 • 遵循莫非定律(Moore’s law)

  3. 1-2 微感測器演進 • 感測器: • 致動器: • 換能器(傳感器):

  4. IC與傳感器的市場比較

  5. 感測器的應用範圍:

  6. 1-3 MEMS 演進 • MEMS的發展目標: • 較成熟的MEMS例子:

  7. MST技術 • 有競爭力的技術特色:

  8. MEMS的市場

  9. 1-4 微機械 • MEMS技術的挑戰: • 微機械: • 相關技術

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