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N- GaN

PR(P): 見光死. PR. P- GaN. MQW. N- GaN. sapphire. PR: 阻擋 icp 蝕刻. PR. P- GaN. MQW. N- GaN. sapphire. Cl -. Ar +. PR. P- GaN. MQW. N- GaN. sapphire. PR. P- GaN. MQW. N- GaN. sapphire. PR. P- GaN. MQW. N- GaN. sapphire. P- GaN. MQW. N- GaN. sapphire. P- GaN. MQW.

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N- GaN

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  1. PR(P):見光死 PR P-GaN MQW N-GaN sapphire

  2. PR: 阻擋icp蝕刻 PR P-GaN MQW N-GaN sapphire

  3. Cl- Ar+ PR P-GaN MQW N-GaN sapphire

  4. PR P-GaN MQW N-GaN sapphire

  5. PR P-GaN MQW N-GaN sapphire

  6. P-GaN MQW N-GaN sapphire

  7. P-GaN MQW N-GaN sapphire

  8. P-GaN MQW N-GaN sapphire

  9. Homework • LED process flow • 請繼續畫出P N電極的製程流程圖

  10. PR(N):光照到的留下 Cr Cr PR(N) P-GaN PR(N) PR(N) MQW N-GaN sapphire

  11. P-GaN PR PR(N) MQW N-GaN sapphire

  12. Vacuum Evaporation Metal Material P-GaN PR PR(N) MQW N-GaN sapphire

  13. Metal Material P-GaN PR PR(N) MQW N-GaN sapphire

  14. Lift-off 丙酮進入，震盪 P-GaN MQW N-GaN sapphire

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