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UMC 0.18µm radiation hardness studies Progress since last Collaboration Meeting Sven Löchner

UMC 0.18µm radiation hardness studies Progress since last Collaboration Meeting Sven Löchner GSI Darmstadt 15 th CBM Collaboration Meeting April 13th, 2010. GRISU Project - Reminder ASIC Single Event Effects Testing site Microprobe Testing site Total Ionising Dose Testing

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UMC 0.18µm radiation hardness studies Progress since last Collaboration Meeting Sven Löchner

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  1. UMC 0.18µm radiation hardness studies Progress since last Collaboration Meeting Sven Löchner GSI Darmstadt 15th CBM Collaboration Meeting April 13th, 2010

  2. GRISU Project - Reminder ASIC Single Event Effects Testing site Microprobe Testing site Total Ionising Dose Testing Progress / News since last Collaboration Meeting TID SEE Microprobe Summary Agenda 15th CBM Collaboration Meeting - Sven Löchner

  3. Project objectives: Characterisation of UMC 0.18µm CMOS process concerning : Vulnerability against Single Event Effects (SEE), especially Single Event Upsets (SEU) and Single Event Transients (SET) SEU cross section for different Flip-Flop designs and layouts SET sensitivity of the UMC 0.18µm process Critical Linear Energy Transfer (LETcrit ) Single Transistor measurements Comparison of transistor models by simulation Total Ionising Dose (TID)Characterisation of the UMC 0.18µm process under irradiation leakage currents threshold shifts, annealing Reminder: GRISU project 15th CBM Collaboration Meeting - Sven Löchner

  4. GRISU chip UMC 0.18µm process 1.5 x 1.5 mm² 64 pads 28 core pads 36 pads Test structures for SEU measurements Ring oscillator for TID / SEU measurements Test structures for TID measurements Test structures for SET measurements, Qcrit GRISU test ASIC 15th CBM Collaboration Meeting - Sven Löchner

  5. Installation of a test facility for ASIC irradiation with heavy ions at X6 cave at GSI (in cooperation with bio physics group) Beam monitoring via ionisation chamber Dosimetry setup available Irradiation of DUT in air Testing parameters: 11.4 MeV/u LET in the range of 1...62 MeV·cm2/mg (SiO2) 103…1012 ions / (cm2 s) 50mm beam size Low Energy testing site 15th CBM Collaboration Meeting - Sven Löchner

  6. Setup of a single hit heavy ion test environment for ASIC irradiation (micro beam test line) possibility of a localised radiation of the DUT resolution: ~500nm scanning area: down to 10x10µm² energy of ions: 4.8 MeV/u Microprobe testing site • First results from Xe-132 test: • plot shows overlay of detected ion positions (3) which triggered an SET and chip layout •  SET homogeneity map of ASIC 15th CBM Collaboration Meeting - Sven Löchner

  7. TID testing with X-rays Irradiation facility at Institute for Experimental Nuclear Physics, University of Karlsruhe 60keV X-ray, 40...240krad/h GRISU chips tested Total dose between 320krad and 1000krad(SiO2) Operating dose rate between 80krad/h and 230krad/h Measurements: leakage current, threshold shift, transition times, total power consumption, annealing, … of non-hardened digital library Total Ionizing Dose (TID) tests • Leakage current of ESD protection diodes increased by factor of 100 • Average core current increased by factor 2 (after 600krad) • Transition times of ring oscillator inverters decrease (changing of NMOS / PMOS ratio) • Good annealing performance 15th CBM Collaboration Meeting - Sven Löchner

  8. TID testing with X-rays Due to a miscalibration of the X-ray system at Karlsruhe: dose rate was only ~40% than displayed by the diagnostic system(wrong for all measurements between 2008 and 2009) all results are now updated Cadence simulation models (for different dose levels) still need to be updated No influence on annealing Still good annealing performance Progress (since last meeting) 15th CBM Collaboration Meeting - Sven Löchner

  9. SEE testing 7 irradiation tests so far C-12, Ar-40, Ni-58, Ru-96, Xe-132 final dosimetry for Ar-40 and Ru-96 run are not yet done problems with the “old” GSI scanning electron microscope (SEM) now scheduled with new system for end of April All Cross section measurements will then be updated Progress (since last meeting) 15th CBM Collaboration Meeting - Sven Löchner

  10. Microprobe testing 2nd testing with the GSI microprobe system (Au-197 run 02/2010) Improve of the spatial resolution First results are combined together with ASIC layout D-FlipFlop with additional buffers Position of triggered SEE events – DFF loaded with „0“ Position of triggered SEE events – DFF loaded with „1“ Overlay of both triggered events Progress (since last meeting)  Redundant layout structures should keep at least 1um apart 15th CBM Collaboration Meeting - Sven Löchner

  11. Development of a UMC 0.18µm Test-ASIC (GRISU) Installation of testing site for SEE measurements Installation of a micro beam testing site for single ion hit measurements TID testing of the UMC 0.18µm process at Karlsruhe Still to do: TID irradiation with low dose rates Long term test with gamma source (for example Co-60) Neutron test “On hold”: 3rd iteration of GRISU test ASIC “on hold Triple redundant test structures (for SEU / SET improvement) Test circuits for SET suppression Re-design of the DICE layout cells (decrease SEU cross-section) Right now nothing is contradicting against the UMC 0.18µm process Work progress at GSI so far… 15th CBM Collaboration Meeting - Sven Löchner

  12. Reference to further talks: EE-Gruppenmeeting (7.7.2008)GRISU Statusreport CBM-XYTER Family Planning Workshop (5.12.2008)UMC 0.18μm radiation hardness studies IT/EE-Palaver (20.1.09) Untersuchung von Strahlungseffekten in anwendungs- spezifischen integrierten Schaltungen (ASIC) Strahlungseffekte 13th CBM Collaboration Meeting (12.3.2009) Radiation hardness studies - Update EE-Gruppenmeeting (29.6.2009)GRISU Microbeam Irradiation 14th CBM Collaboration Meeting (7.10.2009) UMC 0.18μm radiation hardness studies - Update Link: http://wiki.gsi.de/cgi-bin/view/EE/GRISU Additional Talks & Documents 15th CBM Collaboration Meeting - Sven Löchner

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