NANOSCALE OPTICAL METROLOGY AND CHARACTERIZATION

1. NANOSCALE OPTICAL METROLOGY AND CHARACTERIZATION Lukas Novotny The Institute of Optics, University of Rochester, Rochester, NY, 14627.

2. OUTLINE 1. BACKGROUND (NANO-OPTICS) 2. NANOSCALE METROLOGY - general thoughts - requirements for nanoscience/technology 3. EXAMPLES - nanoscale subsurface spectroscopy and imaging Concentrate on R and not D ! -> D builds on R

3. . . . . . . Nanoscience Nanotechnology NANO-OPTICS . . . . . . Basic Sciences Optics Technical Sciences Nano-Optics is the study of optical phenomena and techniques near or beyond the diffraction limit.

4. THINGS ARE GETTING SMALLER . . . nano-optics WHAT ARE THE OPPORTUNITIES FOR OPTICS ?

5. nanoscale probing nanoscale manipulation nanoscale spectroscopy DE = h n Dx = l/2 DV < l3(S/N) J L J J > F ~ E2 WHY NANO – OPTICS ?

6. CHEMICAL VS. SPATIAL INFORMATION molecular NMR NSOM - IR -Raman Ion microscopy Chemical Information atomic X-Rays Dielectric Analysis Electron Microscopy low SPM 1 m 1 nm 1mm Spatial Resolution S. Stranick, NIST

7. TWO IMPORTANT LENGTH-SCALES proteins quantum states

8. New instrumentation catalyzes new discoveries “New Truths become evident when new tools become available” (Rosalyn Yalow)

9. Bragg diffraction, 1912 Structure of DNA,1953 X-ray diffraction of DNA STRUCTURE OF DNA

10. Leeuwenhoek, 1680 CELL STRUCTURE / FUNCTION

11. NATIONAL NANOTECHNOLOGY INITIATIVE 1982 1986 1994 1996 1986 2001 Single Molecule Spectroscopy Optical Tweezers STM NNI AFM NFP36 NSOM “The rapid advances of nanoscience and nanotechnology are due in large part to our newly acquired ability to measure and manipulate individual structures on the nanoscale.” (Nanoscience & Nanotechnology Initiative)

12. Carbon nanotubes, 1991 (Iijima) NANOMATERIALS TEM, 1931 (Knoll & Ruska)

13. atomic manipulation, 1993 NANOSCIENCE / NANOTECHNOLOGY STM, 1982

14. Cantilever array sensors, 1998 Membrane proteins, 1994 NANOBIOTECHNOLOGY AFM, 1986

15. INSTRUMENTATION – RESEARCH – TECHNOLOGY CYCLE ADVANCES IN TECHNOLOGY (fabrication, materials, .. ) ADVANCES IN INSTRUMENTATION (microscopy, spectroscopy, .. ) ADVANCES IN SCIENCE (new principles, .. ) WHAT’S FIRST (egg or hen) ? INSTRUMENTATION (need input to think)

16. Challenge #1: Demand in nanoscale subsurface imaging and characterization NNI GRAND CHALLENGE #4 : NANOSCALE INSTRUMENTATION & METROLOGY Many future nanoscale devices and components need to be protected from interactions with the environment ! Si capping layer Current high-resolution techniques are surface specific (STM, AFM, EM, .. )

17. NNI GRAND CHALLENGE #4 : NANOSCALE INSTRUMENTATION & METROLOGY Wer misst, misst MIST ! (any measurement is a perturbation to the system to be measured) Challenge #2: Demand in minimally invasive nanoscale instrumentation Measurement artifacts ! Molecule + Electrode problem (-> Duncan Stewart)

18. Challenge #3: Demand in chemically specific nanoscale instrumentation Microscopy & Spectroscopy spatial resolution chemical specificity NNI GRAND CHALLENGE #4 : NANOSCALE INSTRUMENTATION & METROLOGY What are we measuring ? (interpretation of measurements often relies on prior information)

19. Materials have transparent spectral windows -> subsurface imaging Light-matter interaction is chemically specific -> spectroscopy No mechanical contact -> non-invasive Resolution -> challenged by diffraction LIGHT

20. THE DIFFRACTION CHALLENGE E. Abbe, Arch. Mikrosk. Anat.9, 413 (1873) E.H. Synge, Phil.Mag.6, 356 (1928) D.W. Pohl et al., Appl.Phys.Lett.44, 651 (1984)

21. Example #1: 4Pi Confocal Fluorescence Microscopy Increasing numerical aperture S. Hell, MPI Goettingen

22. 10 mm Example #2: Numerical Aperture Increasing Lens (NAIL) conventional subsurface imaging with NAIL S. Unlu & B. Goldberg, Boston University

23. Thermal Imaging with NAIL with NAIL conventional subsurface imaging S. Unlu & B. Goldberg, Boston University

24. Lipid Bilayer 10 8 top 6 4 (nm) 2 bottom mirror Si 0 0.0 2.0 4.0 6.0 8.0 10.0 position on sample (mm) Example #3: Spectral Self-Interference Microscopy SiO2 17000 18000 19000 20000 wavenumber 1/ (cm-1) B. Goldberg, Boston University

25. w w - + o N w o w N Example #3: Near-field Optical Spectroscopy Ultramicroscopy71, 21, (1998).

26. ULTRASHARP PROBES

27. Carbon Nanotubes Standard Optical Microscopy: Near-Field Raman Microscopy: Vibrational Spectrum:

28. Carbon Nanotubes topography Raman scattering line-scan PRL 90, 95503 (2003)

29. MULTITASKING / MULTISPECTRAL NANOSCALE IMAGING electrical Chemical Properties Vis/IR Localized Field Sample Electrical Measurements: Materials Performance - electronic response mapping (µW, rf and dc). - tunneling and resonance spectroscopies Vis/IR illumination: Chemical Properties - local field enhanced IR absorption/Raman scattering. - probes local chemical functionality/structure. S. Stranick, NIST

30. SUMMARY New Instrumentation Catalyzes New Discoveries Challenges for nanoscale metrology: • subsurface imaging and characterization • minimally invasive (perturbative) • chemically specific (spectroscopy) • DISCUSS IN TERMS OF GRAND CHALLENGE APPLICATIONS What we develop within NNI might become important after NNI ! Thanks: NSF, DOE, DARPA, AFOSR

31. NNI GRAND CHALLENGE #4 : NANOSCALE INSTRUMENTATION & METROLOGY Challenge #4: Instrument development requires time (> 3 years grant) Scanning Electron microscopy 1935 .. 1965 to get 10nm resolution ! Optical microscopy 1650 .. 1994 to image a single molecule !

34. NEIL’S EXPERIMENT

35. NNI GRAND CHALLENGE #4 : NANOSCALE INSTRUMENTATION & METROLOGY Statement #5: Funding for combined “development + application” projects

36. Opal Parides Sesostris Morpho Rhetonor Magnetotactic Bacteria Lepidopteran Eye Photosynthetic Membranes NANOPHOTONIC STRUCTURES IN NATURE

37. ARTIFICIAL NANOPHOTONIC STRUCTURES Semiconductor Nanostructures Surface Plasmon Waveguides Light Confinement Photonic Crystals Microresonators Laser Cavities Quantum Dots Quantum Confinement Plasmon-Biosensors Nanocomposite Materials Particle Plasmons

38. Univ. of Rochester, Boston Univ., Penn State, NIST, Rice Univ., Univ. of Illinois U-C NEW INSTRUMENTATION FOR NANOSCALESUBSURFACE SPECTROSCOPY AND TOMOGRAPHY • Approaches: • Explore new ideas based on: • - near-field optical microscopy (field enhancement) • - microwave STM (single spin detection) • - solid immersion lens microscopy (depth resolution) • - near-field tomography (3D reconstruction) • - fluorescence self-interference (nanoscale localization) Objectives: • Develop measurement platform for nanoscale subsurface spectroscopy and tomography. • Combine different spectroscopic techniques (microwave, Raman, fluorescence, IR). Achievements: • Raman imaging with 13 nm spatial resolution. • Localization and multi-band spectroscopy of molecules with 0.3 nm accuracy. • Microwave STM of dopants in semiconductors, molecules, and nanostructures. • Near-field inversion algorithms for nanoscale tomography.

39. OBJECTIVE OF PROGRAM Develop techniques for non-destructive, chemically specific, three-dimensional nanoscale characterization of subsurface structures.

40. ATOMIC STRUCTURE Hydrogen lamp Balmer, 1885 Bohr-Sommerfeld atom model …

41. photoreceptors in retina enzymatic dynamics function of motor proteins photosynthetic membranes Single Molecule Detection Optical Tweezers Adaptive Optics Near-field Optics