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1. Basic Alignment of Tecnai F30 Yan Cao
Sept. 9th 2002
Case Western Reserve University
2. Before Starting Check the vacuum (gun = 1, column < 20)
Remove the objective aperture
Refill liquid N2 (turn away the monitor)
DO NOT spill N2 on the glass of the viewing chamber
3. Inserting the Specimen Holder Select the appropriate holder, click “return”
Make good connection with ?-tilt cable
Hear the tilt motors reset the ?-tilt
Push the holder into column carefully
Check the vacuum, open V4 and V7
4. Abnormal Behavior Do not insert the holder into the column
Switch off the turbo pump (7 min down)
Make sure V41 and V8 are closed
Reset the holder and Remove it
NEVER shut off the computer
5. Condenser Aperture (C1 & C2) Aperture sizes influence coherence convergence, spot size and total current
Make the beam stay centered on the screen
Ensure the reproducible illuminating conditions
Misalignment leads to a beam tilt
6. FEG: TEM-BF Mode C2 aperture : 100/50 ?m
Objective : 100 ?m
Extractor : 3.5 ? 4 kv
Emission : < 100 mA
Gun Lens : 1-3
Spot size : 1
Magnification : 500 k ~ 750k
7. FEG – EDX Nanoprobe Mode C1 aperture : 30 ?m
C2 aperture : 150 ?m
Objective : No
Extractor : < 4.6 kv (i.e. crossover mode)
Gun Lens : 5-8 (depending on current)
Spot size : 5
Do not change saved FEG registers
8. Alignment Procedure Eucentric focus
Gun alignment / condenser stigmator
Beam tilt pivot point
Rotation center
Coma-free pivot point
Coma-free alignment
9. Eucentric Focus Importance
Area of interest stays centered when tilting
Defines the reference value for the objective-lens current
Procedure
Press Eucentric focus button to set the objective lens at eucentric height
Press wobbler button, focus specimen by adjusting “z height”, not “focus”
10. a. Focus without use of the wobbler
b. Focus after use of the wobbler
11. c. Out of focus - wobbler in chosen direction.
d. Out of focus - wobbler perpendicular to c.
12. Alignment Procedure Eucentric focus
Gun alignment / condenser stigmator
Beam tilt pivot point
Rotation center
Coma-free pivot point
Coma-free alignment
14. Condenser Stigmator Purpose
Correct for beam astigmatism
Determine the relation between a change in stigmator setting and the beam shift
Misalignment lead to a beam shift
Procedure
Focus the beam (not completely).
The current through the stigmator is wobbled in the x or y direction. Minimize beam movement
16. Alignment Procedure Eucentric focus
Gun alignment / condenser stigmator
Beam tilt pivot point
Rotation center
Coma-free pivot point
Coma-free alignment
17. Beam Tilt Pivot Point Purpose
Make sure the beam does not shift when tilted
Keep beam centered during rotation-center alignment, focusing with the wobbler and DF
Procedure
Set up the image.
Align x or y pivot points, until a tilting beam remain centered on the specimen, giving no beam shift
18. Alignment Procedure Eucentric focus
Gun alignment / condenser stigmator
Beam tilt pivot point
Rotation center
Coma-free pivot point
Coma-free alignment
19. Rotation Center Purpose
Ensure the beam is along the optical axis of the objective lens
Minimizing lens aberrations and image movement during focusing
Procedure
Wobble the objective lens current. Image go through focus
Align the rotation center to minimize the movement of the image
Based on beam tilt. Beam alignment procedure.
20. Alignment Procedure Eucentric focus
Gun alignment / condenser stigmator
Beam tilt pivot point
Rotation center
Coma-free pivot point
Coma-free alignment
21. Coma-free Pivot Points Purpose
Ensure the beam stays well-centered while wobbling
Obtaining reliable and accurate coma-free alignment
Procedure
Center the beam and focus the image.
The beam is wobbled in x or y directions. Adjust coma-free pivot point until the two wobbling beams overlap. Minimize the movement
22. Alignment Procedure Eucentric focus
Gun alignment / condenser stigmator
Beam tilt pivot point
Rotation center
Coma-free pivot point
Coma-free alignment
23. Coma-free Alignment Purpose
Ensure the beam along optical axis of the objective lens
Obtaining reliable and accurate high-resolution data
Procedure
Center the beam and focus the image
The beam is wobbled in the x or y direction with a set amount of beam tilt. Adjust the coma-free center until two “wobble” images have the same defocus.
24. Do not save settings in “Filter Control”
Do not overexpose the CCD
Familiar with the button for manually closing V7 (in case of vacuum emergency)
Do not save your experimental data to microscope computer, but the black dell
Never stop an XEDS or EELS in STEM mode
25. Thanks for your attention!