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Series ZQ Space Saving Vacuum Ejector Vacuum Pump System

New Product Presentation. Series ZQ Space Saving Vacuum Ejector Vacuum Pump System. Index. Background. Features. Technical Details. Applications. Background. Necessity of a compact type ejector for the makers of handling equipment for the Semiconductor Industry.

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Series ZQ Space Saving Vacuum Ejector Vacuum Pump System

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  1. New Product Presentation Series ZQSpace Saving Vacuum EjectorVacuum Pump System

  2. Index Background ZQ Features TechnicalDetails Applications

  3. Background • Necessity of a compact type ejector for the makers of handling equipment for the Semiconductor Industry. ZQ • As a result, SMC develops a light weight, space saving body ejector ZQ in order to replace the ZX series, initially and specifically designed for fulfilling the above requirements.

  4. Index Background ZQ Features TechnicalDetails Applications

  5. 21.6 mm 10 mm Unique Features • Space Saving by using a compact ejector body  10mm width. ZQ 35% smaller in comparison to existing series! New ZQ Conventional ZX Besides manifold type also able to connect at pitch 10mm. • Lightweight due to compact size and the use of resin materials (instead of aluminum) for the manifold base. 40% lighter (in case of 4 station manifold) in comparison to existing series!

  6. One-touch fittings Other Features • Single unit with vacuum pressure switch and suction filter. ZQ • Digital vacuum pressure switch and LED display function as a standard. • One-touch fittings. • 2 NPN/PNP options available. • CE Compliant.

  7. Index Background ZQ Features TechnicalDetails Applications

  8. Technical Details 1/6 Ejector Specifications ZQ

  9. Technical Details 2/6 Vacuum Pump System Specifications ZQ

  10. Break flow rate adjustment needle Break valve VQ110 Main valve for break Suction filter Supply valve VQ110 Vacuum pressure switch Main valve for supply Silencer sound absorbing materials Nozzle Diffuser Technical Details 3/6 Single Unit Construction (I) ZQ • Main valve is equipped for vacuum break to increase flow rate. • VQ is used as pilot valve for supply and break.

  11. Technical Details 4/6 Single Unit Construction (II) ZQ Vacuum Mode Supply Vacuum Break Vacuum Mode Supply Vacuum break

  12. 107 PE port (M3) 71.9 V port (M5) 9.7 SUP port (M5) 10 Technical Details 5/6 Overall dimensions: Single Unit (ZQ11) ZQ

  13. 107 72.4 16 pitch=10 Vacuum port (V port, M5) L Technical Details 6/6 Overall dimensions: Manifold (ZZQ1) ZQ Dimensions (mm)

  14. Index Background ZQ Features TechnicalDetails Applications

  15. Applications • Main application  equipment handling for the Semiconductor Industry ZQ • As this product is very compact in size, it is optimum for placing very close to the workplace and workpiece, in those applications where a high speed break response is needed.

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