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MAGNETOELEKTRONIKA przykłady zastosowań. T. Stobiecki Katedra Elektroniki AGH. 1 wykład 11.X.2004. Magnetoelektronika. Bio-sensor (G. Reiss, et al. Univ. of Bielefeld) Cienka warstwa w bezinwazyjnej chirurgii
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MAGNETOELEKTRONIKAprzykłady zastosowań T. Stobiecki Katedra Elektroniki AGH 1 wykład 11.X.2004
Magnetoelektronika • Bio-sensor (G. Reiss, et al. Univ. of Bielefeld) • Cienka warstwa w bezinwazyjnej chirurgii (K. Ishiyama, et al. Research Institute of Electrical Communication,Tohoku University) • Nowości - magnetic recording • Magnetoresistive logic systems • Nasz udział
R H Vertical magnetic field induces dipol field of bead Detection by GMR / TMR Sensor Signal prop. Number of Beads Increased sensitivity by lock-in technique, uncovered references, layout-Optimization possible: single molecule detection Special applications Special applications : - Bio-Chip
3) Hybridisation with beads and detection with XMR sensor 1) Immobilisation of target molecules Fixed DNA single strand S magnetic bead, coated with Streptavidin, binds to a selected molecule XMR Sensor Haftschicht XMR sensor detects stray field Si- Substrate 2) Hybridisation of the probe molecules hybridized DNA Biotin N Detection: Magnetoresistive biochip sensor • GMR (Giant MagnetoResistance) • TMR (Tunnel MagnetoResistance) • detection of single beads / molecules IEEE Trans. Magn., (2002), ICM’03
22 20 18 16 14 0° 12 Tunnelelement TMR-Amplitude in % Uunten 90° 10 8 6 4 Iunten 2 Ioben 0 -50 -40 -30 -20 -10 0 10 20 30 40 50 0° Feld in Oe 90° Uoben Special applications GMR / TMR - Sensors Design Characteristic GMR TMR
DC-measurements with Bangs 0.8 µm-beads Ref 1 - Sensor 3 Ref 1 - Ref 2 mit beads ohne beads Sensor coverage 1) 5 % 2) 6 % 3) 20 % 4) 23 % 5) 40 % 77 µV 102 µV 267 µV 284 µV 557 µV Signal Special applications
DC-measurements with Bangs 0.8 µm-beads Special applications J. Schotter, P.B. Kamp, A. Becker, A. Pühler, D. Brinkmann, W. Schepper, H. Brückl, G. Reiss: A Biochip based on Magnetoresistive Sensors, IEEE Trans. Magnet., 2002
TMR = Tunneling MagnetoResistance T=10K NiFe sense layer Al2O3 T=300K CoFe MnIr hard magnetic layer TMR Biochip Sensor: 1.6 DC-measurement, Bangs 0.8 µm Beads parallel Bias-Field of -6.4 Oe 1.4 2x2 µm2 elements 1.2 ~5 % coverage 1.0 TMR Amplitude (%) 0.8 50 µm 0.6 0.4 0.2 0.0 -100 -80 -60 -40 -20 0 20 40 60 80 100 perpendicular field (Oe) 5 nm Detection: TMR sensor
Advantages of MAGNETIC micro-machine • Wireless operation • Simple structure • Ways to supply energy • F = M (dH/dx) • T = M H sin q • Magnetostriction • V = df/dt Flying machine K.I.Arai, W.Sugawara, K.Ishiyama, T.Honda, M.Yamaguchi, “Fabrication of Small Flying Machines Using Magnetic Thin Films,” IEEE Trans. Mag., vol.31, No.6, pp.3758-3760 (1995).
0 Oe 150 Oe 300 Oe Two principles to move Rotation by rotating magnetic field Bending by DC magnetic field
Lower invasive surgery What is the challenge to obtain the medical robots? →Wireless energy supply
Spiral-type Magnetic Micro-Machine Rotational magnetic field Thrust (swimming direction) Magnetization
Field rotation plane GOAL GOAL START START Controlling the swimming direction
Miniaturization of the machine Tungsten wire : 20mmf Machine diameter : 0.15mm NdFeB : sputtered
Burrowing Machine Driven by Magnetic Torque Machine Rotational Magnetic Field: 150 Oe, 5 Hz The machine can burrow into organismal tissue.
Heat Assisted Magnetic Recording (HAMR) Co/Pt multilayers by laser heat treatmnet anisotropy enhancement lower coercivity.
Special applications: Magnetoresistive logic „Traditional applications“: Sensors (Car, Automatization) Magnetic Random Access Memory Special : - Magnetoresistive logic: The fundamental logic gate: clock line jx jy word line Vout logic input : magnetic field, logic output : voltage / current Advantage: Field programmable, Logic function can be changed - Reconfigurable computing
Special applications: Magnetoresistive logic Spin logic setup (7 mask e-beam process) 20µm 1mm
Special applications: Magnetoresistive logic Switching by current lines TMR: 20% @ 100mV (1/2 of single ellipse) 2 ellipses, 0.28µm2, serially connected Hoffset = -60 Oe
Special applications: Magnetoresistive logic Junction TMR Resistance H ± H pin C [Ohm] [Oe] 1 47.1 % 308 46.2 ± 2.3 2 47.1 % 308 46.0 ± 2.3 3 46.9 % 310 46.1 ± 2.5 4 47.0 % 310 46.3 ± 2.5 5 46.8 % 312 46.4 ± 2.5 Steuerleitungen Lese-leitungen j4 j3 j2 j1 Vout Io Io TE4 TE3 TE2 TE1 Masse R. Richter, L. Bär, J. Wecker, G. Reiss: Nonvolatile programmable spin-logic for reconfigurable computing, Appl. Phys. Lett., 80 (2002) 1291
Special applications: Magnetoresistive logic Programmed AND : Clocked operation
Nasz udział http://layer.uci.agh.edu.pl/maglay/podstrony/konfer/