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NANOMATERIALS FABRICATION TECHNIQUES (AN INTRODUCTION). BY E.INDHUMATHI . INTRODUCTION. NANOFABRICATION design & manufacture of devices measured in nanometers. Physical vapour deposition technique Chemical vapour deposition technique Self assembly Lithography. PVD.
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NANOMATERIALS FABRICATION TECHNIQUES(AN INTRODUCTION) BY E.INDHUMATHI
INTRODUCTION NANOFABRICATION design & manufacture of devices measured in nanometers. • Physical vapour deposition technique • Chemical vapour deposition technique • Self assembly • Lithography
PVD • Fundamentally a vaporization coating technique, involves transfer of materials in atomic level • The material that is going to be deposited starts out in solid form. • Carried out under vaccum condition. • Work-evaporate transport react deposit
CVD • Depositing solid material from gaseous phase • Work- gases are delivered into the chambers at ambient temperature. come in contact with heated substrate. react or decompose forming the solid phase. deposit over the substrate.
SELF ASSEMBLY • Process by which the molecules adopt a defined arrangement without guidance are management from an outside source. • Refered to as bottom up manufacturing technique. • 3 –features of SA Order - must have higher order than the isolated component Interactions- keyrole is weak interactions. - play important role in material synthesis. -weak intrections hold promient place in materials. building blocks-nano & mesoscopic structures with different chemical compositions, shapes, functionalities. - can be synthesized through SA
LITHOGRAPHY • Refered to as top down technique • Science of etching, writing, or printing at microscopic level • Desired final structure is carved from a larger block • Lithographic technologies • Nano imprint lithography • Interference lithography • X-ray lithography • Extermeuv lithography • Magneto lithography • Scanning probe lithography