Integrated Microfabrication Facility

1. IMF Integrated Microfabrication Facility A world class facility to develop the technology needed to fulfill the CITRIS vision. 18 / 9 / 2001 UC Berkeley Microfabrication Laboratory 1

2. CITRIS Research Priorities Disaster Response - new sensors for rapidly determining casualties, structural integrity, and most effective emergency response Microfabricated neural probe L.P. Lee group Low energy 16mm3 integrated sensor KSJ Pister Group Micromirror Drive Mechanism M.P. Young Energy Efficiency - networked miniature sensors proposed for monitoring building conditions to maximize efficiency of utility systems UC Berkeley Microfabrication Laboratory

3. Electrolytic oxygen microbubbler R.T. Howe, J.D. Keasling groups Biological processing microdevice A.P. Pisano, T.D. Sands groups CITRIS Research Priorities Healthcare - discrete sensors for automated or point of use health monitoring. Integration with biological receptor materials of BNC. Transportation - optoelectronic sensors required for analysis of traffic flow to maximize efficiency of transportation networks Environment – networked sensors for automated air and water analysis to enable immediate detection of and response to contamination situations UC Berkeley Microfabrication Laboratory

4. The Challenge: Integrate Research across several disciplines MEMS ICs Bioelectronics Optoelectronics UC Berkeley Microfabrication Laboratory

5. IMF Berkeley Microlab The opportunity: The Integrated Microfabrication Facility Integrated Circuit Design MEMs Berkeley Sensor and Actuator Center Optoelectronic materials UC Berkeley Microfabrication Laboratory

6. Based Upon the Successful Microlab Model: Shared Laboratory Capabilities Common Academic Model: Individual Fiefdoms Successful Microlab Model: Shared Laboratory • The shared model implies professional administration and support staff, funded by “per use” fees: • efficient use of valuable laboratory space • significant improvement in quality of support • PI research flexibility • research cross fertilization UC Berkeley Microfabrication Laboratory

7. Existing Microlab / Future IMF: Accessible to All >70 Principal Investigators; 7 departments, >240 active users from UCD, UCSB and UCSD LBL, LLNL, Sandia NL UC Berkeley Microfabrication Laboratory

8. A Unique High Tech Incubator among the California Institutes for Science and Innovation The Berkeley Microfabrication Laboratory Affiliates has 28 member companies, many with fewer than 10 employees. The IMF will greatly expand these activities. Adriatic Research Institute Advanced Integrated Photonics Alien Technology Corp. Analog Devices Bandwidth9 Bluefox Covalent Materials, Inc. DICon Fiberoptics, Inc. Emitronix, Inc. General Nanotechnology GENOA Corporation Hewlett-Packard Company Jet Propulsion Laboratory MEMS PI MicroAssembly Tech MicroGen Systems Molecular Reflections Nanochip, Inc. NewPeregrine, Inc. Network Photonics Inc. OMM, Inc. Onix Microsystems, Inc. Paracer, Inc. Photon Imaging, Inc. Progressant Technologies Robert Bosch Corporation Sandia National Lab UC Berkeley Microfabrication Laboratory

9. Compound semiconductor processing for integration of optoelectronic components MEMs processing compatible with biologically modified substrates and silicon ICs IMF Silicon Integrated circuit fabrication with better than 0.25 mm minimum geometries Berkeley Microlab Bioengineering Nanotechnology Center Integrated Materials Laboratory Integrated Microfabrication Facility Education - fiber connected teaching laboratories for long distance learning and remote access to specialized analytical equipment. UC Berkeley Microfabrication Laboratory

10. 16,000 ft2 utilities and support (basement / roof / perimeter) 5000 gal DI water, 7gpm, 60gpm non-DI recirc. chilled water 30 changes per hour air filtering, 60 ft3/min 80-100psi clean dry air multiple hazardous gas and liquid effluent treatment systems 300 tons cooling capacity, >50,000 ft3/min supply and exhaust air 9000 gal liquid nitrogen storage tank, 400 gal liquid oxygen storage toxic and flammable compressed gas delivery and storage area equipment and supplies delivery and staging area Significant Infrastructure Requirements 20,000 ft2 Class 100 clean room (1st floor) 16-20 ft ceilings and 20-30 ft spans critical for equipment installation 8” silicon, 8”/6” MEMs, optoelectronics, and multi-substrate integration UC Berkeley Microfabrication Laboratory

11. Significant Space Allocation UC Berkeley Microfabrication Laboratory

12. Extensive Equipment Requirements Laboratory construction from CITRIS development funds (~44M) Laboratory equipment funding (~50M) corporate equipment donations existing Microlab equipment new funding Detailed tool lists will include: <.25mm photolithography (8”, 6” and manual) in house >1mm minimum feature mask production thin film deposition (furnace, rapid thermal, and plasma) thin film etching (wet etching and plasma) Analysis (CDSEM, TEM, ellipsometry, profilometry, interferometry) MEMs specific (etch release, supercritical drying,capillary self assembly) packaging (electroplating, dicing, wafer/wire/flipchip bonding) UC Berkeley Microfabrication Laboratory

13. “Small Feature Reproducibility” Group – key potential sponsors for equipping IMF • Advanced Energy • ASML • Atmel Corp. • Advanced Micro Devices • Applied Materials • Asyst Technologies Inc. • Cymer • Etec Systems Inc. • Intel Corporation • KLA-TENCOR • Lam Research Corp. • Mykrolis Corp. • Nikon Research Corp. • Novellus Systems Inc. • Silicon Valley Group • Schlumberger • Tokyo Electron Limited UC Berkeley Microfabrication Laboratory