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Objective 8.7: « Molecular Scale Devices and Systems ». ICT Call 6 FP7-ICT-2009-6. ATOMIC SCALE AND SINGLE MOLECULE LOGIC GATE TECHNOLOGIES. (January 2011- December 2014). Coordinator : C. Joachim. Project Number : 270028. 40 nm. Atome-molécule « Concept Chip ». 100 m m.
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Objective 8.7: « Molecular Scale Devices and Systems » ICT Call 6 FP7-ICT-2009-6 ATOMIC SCALE AND SINGLE MOLECULE LOGIC GATE TECHNOLOGIES (January 2011- December 2014) Coordinator: C. Joachim Project Number : 270028
40 nm Atome-molécule « Concept Chip » 100 mm
Atom Tech Process Flow
3 nm 100.8 nm Si(100) 2x1 LT-UHV STM 100 pA, -2.5 V
Atom Tech Process Flow
Interconnexion face arrière (compatible UHV)
Atom Tech Process Flow
Surface contacting nano pads 41.4 nm 108 SiH dimers in width
100 nm UHV STM MoS2 UHV SEM Si(100)H UHV Transfer Printer A B 10nm TEM cross section 15 0 0 10 20 30 40 50 Pa
Atom Tech Process Flow
? Design à l’échelle atomique?
Au Au Au 4nm x 4nm Molecule NOR gate ACS Nano, 5 ,1436 (2011)
Au Au Au 4nm x 4nm Molecule NOR gate ACS Nano, 5 ,1436 (2011)
Atom Tech Process Flow
Atom Tech Process Flow
P10 (Krakow) and P11 (Singapore) Atomic scale interconnection machine
10nm 15 0 40 0 10 20 30 50 17 nm
P1 (Toulouse (PicoLab / CEMES-CNRS) ) Atomic scale Interconnection machine DUF
Atom Tech Process Flow
Objective 8.7: « Molecular Scale Devices and Systems » Thanks for your attention ICT Call 6 FP7-ICT-2009-6 Proposal Number : 270028
Charge utile Système de Guidage Autonetics D17 Minuteman I 1962 1521 transistors, 6282 diodes 28 kg
Horloge atomique Giove B 2007 18 kg 1 ns/jour
Horloge atomique J. Kitching Puce à atomes NIST 2004 75 mW, 1s/300 ans Vapeur de Rb