1 / 27

紫外曝光與蝕刻實驗

紫外曝光與蝕刻實驗. 星期一. 黃啟裕 : 楊昌浩 : 電磁撿測實驗 , 光學灌注 陳智城 : 雜訊測量 , 氧化物製作. 紫外曝光與蝕刻實驗. 星期三. 黃啟裕 : 吳宇正 : 光學灌注 , 電磁檢測 陳名傑 : 雜訊測量 , 氧化物製作 , 磁共振 ,. 實驗有缺失 : 暑假當義工 , 進一步加強物理與技術的訓練 暑假提供專題研究機會 : 先提出實驗構想. 微米與奈米科技. 紫外光曝光 電子束曝光 全像術 光罩 光阻 - 正光阻與負光阻.

ankti
Download Presentation

紫外曝光與蝕刻實驗

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. 紫外曝光與蝕刻實驗 星期一 黃啟裕: 楊昌浩: 電磁撿測實驗, 光學灌注 陳智城: 雜訊測量, 氧化物製作

  2. 紫外曝光與蝕刻實驗 星期三 黃啟裕: 吳宇正: 光學灌注, 電磁檢測 陳名傑: 雜訊測量, 氧化物製作, 磁共振,

  3. 實驗有缺失: • 暑假當義工, 進一步加強物理與技術的訓練 • 暑假提供專題研究機會: 先提出實驗構想

  4. 微米與奈米科技

  5. 紫外光曝光 • 電子束曝光 • 全像術 • 光罩 • 光阻- 正光阻與負光阻

  6. V = V3-V2→Resistance Vh = V2-V1→Hall coefficient ● The pattern for resistivity and Hall measurements

  7. 5 μm

  8. Superconductor YBCO Normal Metal Barrier Ag or Au Insulator Superconductor (YBCO) Substrate Cross-sectional diagram of a ramp-edge superconductor/normal-metal/superconductor (SNS) junction

  9. Geometry of a serial SQUID array with junction width 3 m

  10. Mask Aligner for Photolithography (in clean room, 10000 ppm) UV lamp Mask holder Sample stage

  11. Directly Coupled SQUID Magnetometer Ib Imd Imd V Direct modulation Ime Ime Integrated modulation coil Ib  V

  12. Device Fabrication Step-edge Junctions and SQUID Arrays

  13. Fabrication of step-edge substrates (a) (b) Step-edge line Ar+ beam MgO MgO

  14. Surface morphology of step-edge substrates probed with atomic force microscopy

  15. AFM image of the step-edge substrate Surface morphology of MgO(100) substrate

  16. ExcimerLaser System Wavelength = 248 nm Pulse Energy = 650 mJ Max. Rep. Rate = 50 Hz Average Power = 30 Watts

  17. 3-D Surface Profiler • Device Characterization • Surface Morphology • Spatial Resolution ( 0.1 nm)

  18. La0.7CaCa0.3MnO3 Nd0.7Sr0.3MnO3 PrBa2Cu3Oy Ar+O2 gas YBa2Cu3Oy 5.3 cm 3.5 cm Schematic diagram of the rf sputtering system used 3 cm shutter rf sputtering gun sample holder water-cooled stainless-steel shielding L. M. Wang, H. W. Yu, H. C. Yang and H. E. Horng, Physica C, 256, 57 (1996).

  19. Geometry of a serial SQUID array with junction width 3 m

  20. Typical voltage-flux curve of a SQUID magnetometer at 77 K

  21. (c) Ib (a) (b) V Ib

  22. B (Tesla) -4 -4 10 10 Earth field -5 Environmental fields Biomagnetic fields 10 mT -6 10 -7 Urban noise 10 -8 10 Car @ 50 m nT Flux-gate magnetometer Lung particles -9 10 -10 Human heart 10 Fetal heart -11 10 Human eye Transistor chip @ 2 m pT -12 10 Human brain (a) SQUID -13 10 Transistor die @ 1 m Human brain (response) SQUID -14 10 -15 10 Weak Magnetic Fields

  23. Thanks for your attention! Hong-Chang Yang

More Related