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Richard Hansen

Carbon-Nanotube- Templated Metallic Microstructures for MEMS : Preparation and Characterization. Richard Hansen. Micro-electro-mechanical Systems (MEMS). Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion. MEMS Fabrication Processes. Motivation CNT-M

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Richard Hansen

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  1. Carbon-Nanotube-Templated Metallic Microstructures for MEMS: Preparation and Characterization Richard Hansen

  2. Micro-electro-mechanical Systems (MEMS) Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion

  3. MEMS Fabrication Processes Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion DRIE Deep reactive-ion etching LIGA Lithographie, Galvanoformung, Abformung (Lithography, Electroplating, and Molding)

  4. Carbon-Nanotube-Templated Microfabrication Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion

  5. Carbon-Nanotube-Templated Microfabrication Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion

  6. CVI Using Metal Carbonyl Precursors Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion Heating Electrodes CNT Sample Cartridge Heater Gas Metal Carbonyl

  7. High Tensile Stress in Deposited Metal Film Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion 1 mm

  8. Extent of Infiltration Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion 200 μm 200 μm 200 μm 1 μm 1 μm 1 μm

  9. Structure of Metal film in CNT composite materials Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion The metal oxycarbide puts metal atoms in an FCC structure with C or O at their octahedral sites (Lattice constant of about 4.16Å) TEM Analysis Powder Diffraction

  10. Materials Properties of CNT composite materials Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion Cantilever Setup Young’s Modulus on the order of 10 GPa 4-Point Probe Setup via the Van der Pauw Method Resistivity on the order of 100 μΩm

  11. Conclusion Motivation CNT-M CVI Process CVI Challenges Materials Properties Conclusion • Versatile Process • High-Aspect-Ratio • Materials Properties Dominated By Filler Material

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