1 / 4

Me-C:H by CAAD

Me-C:H by CAAD. PVD/CAAD single synthesis Adhesion high ionization Low cost investment Industrialized production. Me-C:H layer. Transition layer. Plasma diagnostics Catalysis effect of metal doping Nitrogen doping effect. Metal nitride/carbide. Substrate.

asha
Download Presentation

Me-C:H by CAAD

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Me-C:H by CAAD • PVD/CAAD single synthesis • Adhesion • high ionization • Low cost investment • Industrialized production Me-C:H layer Transition layer • Plasma diagnostics • Catalysis effect of metal doping • Nitrogen doping effect Metal nitride/carbide Substrate

  2. Schematic of deposition process Dissociation of reactive species Me+, e-, particles FILM SUBSTRATE EVAPORATOR SOURCE Me++ e- + CxHy → Me, CmHn, Ci, H .. Transport from source to substrate Emission of metal species Film growth on substrate

  3. Chemical analysis of Cr-C:H-- RBS and ERD C2H H Cr Substrate P(C2H2)=1.5Pa (H/C)at% ~ 1:2

  4. Cross Sectional TEM of Cr-C:H/N(N/C atomic ratio of 3.5%) Cr-C:H/Nlayer Cr-C:H/Nlayer (d) transition layer CrN layer

More Related