Digital-typed Ultra & Mega Sonic.

1. Digital-typed Ultra & Mega Sonic. SilcomTech Co., Ltd. Confidential

2. History of Technology. • Acquired the original patent of digital-typed u/sonic on May ‘99. ☞ (Korea Patent# 0155005) • Acquired the patent of the vibrator with acid-proof on Jun. ‘99. ☞ (Korea Patent# 10-1999-0023310) • Acquired the patent of the digital-typed Megasonic on Feb. ‘00. ☞ (Korea Patent# 2000-4816) • Applied the patent of both “Nozzle & Spray-typed Megasonic” and are under processing. • Oversea patent is under processing all of them. Confidential

3. Quality Certification • Get the quality certification of u/sonic from SEC SDI on Sep. ‘94. • Get the quality certification of u/sonic from PHC on Jan. ‘96. • Under processing JDP with KDNS • Under processing ISO9002 and will be done by Apr. ‘2002. Confidential

4. Why SilcomTech’s Ultra & Mega sonic • -Com sweep auto tuning ☞ Maintain the constant power & frequency by digital operation. • -Com digital display ☞ Easy operation with auto power control & frequency display • -Com self protection ☞ Do preventive maintenance & minimize the trouble by self-diagnosis. • Achieve the cost saving by vendor management & parts localization. Confidential

5. Multi-banded Frequency(U-com auto sweep type) Mono-banded Frequency(Analog type) Characteristic of the Generator • -com sweep & auto tuning. • Maintain the constant power automatically between the generator and the vibrator per the bath conditions, like liquid level, temp, density & concentration etc.,. • No need the adjustment when connect with other units. • Generate multi & mono-banded frequency by each selection. Confidential

6. Digital display 4 digit & 7 segment LED display Short / Open / Warning Indicator Normal power indicator Over power indicator • -com self protection. • Do the detection of the troubles by self-diagnosis when happen the circuit break. open, short or other troubles during operation. • Display the warning. • μ-com digital display a frequency.(#2000-4816) • Display the Frequency with 4 digit & 7 segment with LED. • Do easy operation and preventive maintenance. Confidential

7. Vibration plate Vibration device Bolt-fixed type Bolt-fixed type Epoxy-plated type Epoxy-plated type Competitor SilcomTech Competitor SilcomTech Vibrator Vibration device Characteristic of the Vibrator • Direct mounting on the plate with epoxy. • Longer lifetime against bolt-mounted type.(about 30% up) • Reduce the crack during operation with good welded-plate. • Acid-proof of the plate. • Minimize the plate erosion effect. Confidential

8. Products – Megasonic Generator Confidential

9. Products – Ultrasonic Generator Confidential

10. Products – Generator(Rear side) Confidential

11. Products – Vibrator • Plate-type(bath inside mounted-type for Wafer & LCD cleaning etc.,) • Spray-type(bath topside mounted-type for LCD & Glass cleaning etc.,) Confidential

12. Vibrator Vibrator Digital display 4 digit & 7 segment LED display Power Switch Power adjustment linear switch System configuration 900Watt 1200Watt (1MHz for Megasonic / 28, 40, 60 KHz for Ultrasonic) Confidential

13. Specification - Megasonic Confidential

14. Specification - Ultrasonic Confidential

15. Engineering Drawing • Spray bar type-1100mm long(Top view) Confidential

16. Engineering Drawing • Spray bar type-1100mm long(Side view) Confidential