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工作進度

工作進度. 2004/08/23 張峯榮. 電機系黃光. 2004 年 08 月 17,18 日 黃光 ︰CPW Substrate︰GaAs Cleaning︰TCE→ACE→Methanol→DI-Water Spin︰AZ1500 , step1﹕7000 rpm , 5 sec step2︰6500 rpm , 40 sec Baking︰80℃ 2min Exposure︰6.5 sec ( OAI-500 ) Development︰AZ300 20sec

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工作進度

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  1. 工作進度 2004/08/23 張峯榮

  2. 電機系黃光 • 2004年08月17,18日 • 黃光︰CPW • Substrate︰GaAs • Cleaning︰TCE→ACE→Methanol→DI-Water • Spin︰AZ1500 , step1﹕7000 rpm , 5 sec step2︰6500 rpm , 40 sec • Baking︰80℃ 2min • Exposure︰6.5 sec ( OAI-500 ) • Development︰AZ300 20sec • Ti (700A) / Au (800A)

  3. CPW

  4. E-Beam測試 • 2004年08月18,19日 • Substrate︰GaAs • Cleaning︰TCE→ACE→Methanol→DI-Water • Spin︰PMMA 4% , step1﹕5000 rpm , 5 sec step2︰5000 rpm , 25 sec • Baking︰156℃,15min • Exposure︰140μC/cm2 • Development︰(MIBK/IPA) ,75Sec (IPA) ,35Sec • Ti (100A) / Au (300A)

  5. E-Beam測試 • 2004年08月18,19日 • Substrate︰GaAs • Cleaning︰TCE→ACE→Methanol→DI-Water • Spin︰PMMA 4% , step1﹕5000 rpm , 5 sec step2︰5000 rpm , 25 sec • Baking︰156℃,15min • Exposure︰130μC/cm2 • Development︰(MIBK/IPA) ,75Sec (IPA) ,35Sec • Al (250A)

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