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Advances in Optical Interconnects Ray T. Chen Microelectronics Research Center The University of Texas, Aust SanYa, Chin

Advances in Optical Interconnects Ray T. Chen Microelectronics Research Center The University of Texas, Aust SanYa, China 12/22/2009. Introduction: Projection of Bandwidth. Polymer-based Photonic Technology & Business Structure. Fully Embedded Board Level Optical Interconnection.

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Advances in Optical Interconnects Ray T. Chen Microelectronics Research Center The University of Texas, Aust SanYa, Chin

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  1. Advances in Optical Interconnects RayT.Chen MicroelectronicsResearchCenter TheUniversityof Texas, Aust SanYa, China 12/22/2009

  2. Introduction:Projection of Bandwidth

  3. Polymer-based Photonic Technology & Business Structure

  4. Fully Embedded Board Level Optical Interconnection • Unique Architecture for Optical PWB (Printed Writing Board) ; All the optical components are interposed inside the PCB Solve the package problem / Reduce Cost Effects Micro-via Cu Trace 45 micro-mirror • 1x12 PIN • Photodiode • 1x12 VCSEL VCSEL array • 12-channel Polymer • Waveguide [109 cm ] Optical PCB

  5. Lamination of Optical Waveguide Film & Integration of Thin Film VCSEL VCSEL Optical Layer Optical Layer (~170 mm) 250mm VCSEL PSA (Pressure Sensitive Adhesive) Film (100 / 200 mm) Optical Layer 2 mm PCB Substrate • 12-Channel Polymer Waveguide & 45o Micro-Mirror • Cross Section View of Laminated Optical Layer • Cu Transmission Lines for VCSEL (or PD) Integration PCB Sub PSA film Optical layer Top Emitting VCSEL via PCB Sub - PSA (Pressure Sensitive Adhesive) Film : 100 / 200 mm - Optical Waveguide Film Layer = ~ 170 mm Cu Trans. Lines (thickness = ~ 10 mm) Bottom Emitting VCSEL

  6. Polyimide Based 1-to-48 Fanout H-tree Optical Waveguide on Si-Substrate (c)

  7. System Integration with VCSELs and Photodiodes Thin film waveguide on flexible substrate VCSEL Photodiode L = 3200 um W = 485 um H = 200 um Pitch = 250 um Aperture = 15 um, 10Gbps L = 3335 um W = 690 um H = 200 um Pitch = 250 um Aperture = 70 um, 2.5Gbps

  8. Photonic Crystal structure in nature Opal, the best known periodical structure in nature.

  9. Gigahertz p-i-n Diode Embedded Silicon Photonic Crystal Mach Zehnder Interferometer (MZI) Modulator slow vg Simulation PCW line defect 80 μm PCW N P Cathode Anode - Current injection - + * Dark region: electrode/pad Electrodes - Electrode P+ Intrinsic region N+ Optical Performance PCW • Key features • Slow light in Photonic Crystal Waveguide (PCW) to enhance modulation by up to 40X • Unique electrode routing for on-chip integration with driver • Faster speed due to the enhancement of injection current density by downscaling the device size Modulation Depth 92% electrodes Electrical Characterization I-V curve of photonic crystal p-i-n diode Modulation trace (1GHz, square wave) Lanlan Gu, W. Jiang, X. Chen, L. Wang, and R. T. Chen “High speed silicon photonic crystal waveguide modulator for low voltage application,” Applied Physics Letters, 90, 071105 (2007).

  10. 3-D Image 2-D Image SEM Micrographs & Key Facilities High smoothness, exact round shape JEOL JBX-6000FS/E E-Beam Nano-Lithography Rough sidewall without post-etching oxidation Plama-Therm 790 Si and SiO2 Reactive Ion Etching (RIE) FEI Strata DB235 Dual Beam SEM/FIB Nano-characterization System Focus Ion Beam (FIB) nano-polished endface

  11. Progress of Silicon Nanophotonics The highlight research projects are accomplished by Nanophotonics and Optical Interconnects Research Lab at UT-Austin

  12. MURI-Center for Silicon Nano-Membranes • Scientific novelty and Uniqueness: • Nanomembrane lithography to form 3D well-aligned silicon nanomembranes • Manufacturable process to form nanowires, photonic crystal waveguides and plasmonic structures on nanomembranes • 2D Ultracompact phase locked laser array on silicon as a light source for Optical Phased Array (OPA) • Ultracompact structure provides large steering angles to ± 70o in both azimuth and elevation directions for Optical Phased Array (OPA) • Slow photon in PCW provides a group index above 300 and provides tunable delay time from 0 to 32 nsecs suitable for phased array antenna applications

  13. Detailed Approaches •  Use electrostatic forces to align3D membrane stack to a small fraction of a micron. Many variations are possible: • An interfacial fluid layer to allow lateral motion • A Langmuir-Blodgett trough is already installed for the deposition of mono-& oligo-layers. • thin (<100nm) sliver of crystalline diamond made by FIB.Then the FIB then ‘tacked ‘ it into place again using deposition of Pt to provide the tacks • Transfer printing of nanomembranes that contain nanostructured waveguides  Demonstrated 3-layer devices

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