110 likes | 232 Views
Spatial variation of luminescence of InGaN alloys measured by highly-spatially-resolved scanning cathodoluminescence. F.Bertram et al. Material Science and Engineering B93 (2002) 19-23. Itoh Lab. Takahiro Doki. Contents. ・ Introduction -InGaN -Cathodoluminescence ・ Motivation
E N D
Spatial variation of luminescence of InGaN alloys measured by highly-spatially-resolved scanning cathodoluminescence F.Bertram et al. Material Science and Engineering B93 (2002) 19-23 Itoh Lab. Takahiro Doki
Contents ・Introduction -InGaN -Cathodoluminescence ・Motivation ・Sample ・Experimental Results ・Summary
InGaN Ultraviolet laser diodes (LD) Blue light-emitting diodes (LED) Green (http://www.marumet.co.jp/closeup/led.htm ) ( InN )x + ( GaN )1- x = (Eg~0.80 eV)(Eg~3.40 eV) InxGa1-xN Bandgap energy of InxGa1-xN EInGaN(x) = xEInN + (1-x)EGaN –bx(1-x) b: bowing parameter EInN = 0.80(eV), EGaN= 3.40(eV) b= 2.0(eV)
Effective localization of carriers in Indium-rich potential minima InGaN Nonradiative High quantum efficiency despite high defect densities Thermal Exciton Potential Energy Lattice defect In-rich Radiative Position
Electron beam Auger electron Secondary electron Cathodoluminescence (CL) X-ray Sample High spatial resolution Cathodoluminescence ・Cathodoluminescence (CL) :Luminescence under electron beam irradiation Wavelength of an electron beam is very short. Small excitation spot (to ~10nm) ・Secondary electron →Observation of an image by the scanning electron microscope (SEM)
Motivation • It is said that strong localization of carriers due to inhomogeneity of In concentration results in the high quantum efficiency. • The structural dependence of optical properties of InGaN have been extensively investigated by CL, Micro-PL and SNOM. SNOM: Scanning Near Field Optical Microscope CL measurement to reveal a correlation of microstructures with luminescence for InGaN
30nm InGaN 100nm 20nm 4μm 10nm Buffer layer 0nm Substrate GaN AlGaN sapphire Sample InxGa1-xN (x= 0.03-0.20) AFM image (x = 0.17) AFM: Atomic Force Microscope
Experimental Results ① CL overview spectra (a, d) & The images of emission peaks (b, e) InxGa1-xN x=0.03 Main peak Narrow spectral range Single peak Main peak x=0.17 Additional peaks Wide spectral range First peak Second peak x> 0.1
3nm Experimental Results ② SEM image of InGaN sample with x=0.13. Spike Plateau Crater Craters (density of 2.9 × 108 cm-2) Spikes (density of 1.9 × 107 cm-2)
Experimental Results ③ Images of CLI in the main peak(430nm), the first(450nm), second peak(468nm) of CL overview spectra from InGaN sample with x=0.13. 430nm(Main peak) 468nm(Second peak) 450nm(First peak) Almost homogeneous Exclusively from craters and spikes
Summary • Highly-spatially-resolved cathodoluminescence was measured for InGaN alloys. • The samples with the low In concentration show one main peak in CL spectra. • The sample with the high In concentration has many nanostructures of craters and spikes. CL spectrum shows a main peak originating from all the area and the additional peaks at the lower energy side originating from the nanostructures. • As a result, it was suggested that craters and spikes has In-rich composition and the carriers are strongly localized at them.