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MEMS Two-Phase Vapor Escape Heat Exchanger

MEMS Two-Phase Vapor Escape Heat Exchanger. Milnes David Tarun Khurana Christopher Anderson. Concepts. Evaporator with hydrophobic, porous membrane. Liquid channel. Vapor channel. Hydrophobic, porous membrane. Vapor outlet. Liquid inlet. Silicon. Heat flux.

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MEMS Two-Phase Vapor Escape Heat Exchanger

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  1. MEMS Two-Phase Vapor Escape Heat Exchanger Milnes David Tarun Khurana Christopher Anderson

  2. Concepts • Evaporator with hydrophobic, porous membrane Liquid channel Vapor channel Hydrophobic, porous membrane Vapor outlet Liquid inlet Silicon Heat flux Hydrophobic PTFE, AdvantecMFS Wet etched pores combined with porous membrane. Etched pores act as bubble traps [Meng, 06] Polycarbonate, GE

  3. Process Flow • Diffusion Clean • Oxide Growth • Al. Sputter • Backside Pattern (heaters & sensors) • Al Etch • Ashing • PRX 1000 Clean • Backside LTO deposition • Backside protect • Front-side Oxide Etch (HF) • Front-side pattern (channels) • Front-side channel etch (STSDRIE) • Backside pattern (bond pads) • Pad etch

  4. Process Layout • Backside pattern (through etch) • Through etch (STS DRIE) • Final released device • Adhesive coat on transfer substrate • Contact printing of adhesive • Membrane attachment via UV curing • Attachment of patterned double sticky tape (vapor channel) • Top cover integration

  5. Materials Acquired: • Membranes: • Polycarbonate – 0.1 um. 0.2 um, 0.4 um and 3 um • Teflon – 0.2 um • Membrane characterization apparatus has been built. • Teflon coating of Polycarbonate membranes using similar setup. • Adhesives: • 5 different types on order. • Challenge: • Temperature Stability (chosen adhesives stable to 180 oC). • Adhesion to membrane and silicon. • 3 of chosen adhesives work well with Polycarbonate and Si • 2 of chosen adhesives work well with Polycarbonate and SiO2. • No appropriate adhesive for Tefon and Si. • Characterization apparatus to be designed.

  6. Membrane Test Structure Acrylic Structure Membrane Fluid in

  7. Pressurized Liquid Chamber Membrane Test Structure Pressure Sensor Membrane Test Setup Pressurized Liquid Chamber Membrane Test Structure Pressure Sensor

  8. Temperature Sensor Electronics

  9. Power Supply

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