Nanoimprint lithography (NIL)
Nanoimprint lithography (NIL). UV-curable NIL. Resists for UV-NIL. Mold fabrication for thermal and UV-NIL. Alignment. NIL into metals. NIL systems (air press, roller, roll-to-roll, EFAN…) NIL applications. ECE 730: Fabrication in the nanoscale : principles, technology and applications
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