Revolution in physical vapor deposition

1. Revolution in physical vapor deposition www.greseminnovation.com By mean of plasma arc accelerator

2. Technology Highlights • Coating of heat labile materials • Effective operation in the residual gas atmosphere and reactive gases (nitrogen, oxygen) environment • Coatings with specified properties • Several different materials can be deposited simultaneously or in controlled sequence • Synthesis of the non-transferable material on the surface • Multilayer films can be grown • Roll-to-Roll modification of linear model • Different types of consumables • Operation without micro-drop fraction • Substrate control and transfer of composition • Transfer of electrophysical properties • Substrate zone plasma beam focusing • Permanent “activation” of the substrate by helicon source www.greseminnovation.com

3. Technology Highlights • Known vacuum coating technology, such as thermal, electron-beam, vacuum-arc evaporators and magnetron sputtering systems, cause fractionation of consumable materials and ensure the preservation of its composition in the deposited film. In case this is due to the evaporators Time of Flight effects for components with different masses, and for the magnetron systems - due to the effect of selective spraying at which light components from the target sprayed with greater speed. • Technology from GreSem is performed using a specially designed magnetically activated vacuum-arc source as the generator of the accelerated plasma flow of multi-component coating film and helicon plasma source for surface preparation and its activation during the coating process. www.greseminnovation.com

4. Specification www.greseminnovation.com

5. Plasma source Ion flow density of the coating material is 30 mA/cm2 www.greseminnovation.com

6. Properties of the coatings • Adhesion allows punching, bending and polishing without flaking of the coating; • Coating stainless steel with a thickness of 2 microns to reproduce the purity of the surface treatment article, at a thickness of greater than 5 microns roughness of 0.5 ... 0.7 µ; • If using two sources consumable cathodes of 70 mm diameter, inhomogeneity of the coating thickness is plus or minus 2.5% at the site of an 800 mm wide; • Specific conductivity and density of the coating film thickness of 1 ... 2 microns tabulated values ​​correspond to the volume of fused material www.greseminnovation.com

7. Helicon source Helicon sourceaffects on stainless steel substrate with 30 ... 120 eV ion flow energy Evaporation of Cr is visible (blue) www.greseminnovation.com

8. Comparison x100 faster x2..10 easier x10 cheaper x2..20 effective x250 cheaper and ecoFriendly

9. Deposit Materials • Any steel alloy and contactors • Elements – Ag, Au, Al, C, Cr, Co, Cu, Fe, Hf, In, Mg, Mo, Mn, Nb, Ni, Pd, Ru, Si, Sn, Ta, Ti, V, W, Y, Zn, Zr. • Nitrides – most nitrides of the elements listed • Oxides – most oxides of the elements listed • Carbides – most carbides of the elements listed • Precious metals – gold, platinum, silver, palladium, ruthenium and iridium. • Compounds and alloys – AlSi, AlSn, AZO, B4C, brass, CrB2, CoCrMo, CuO, Hastelloy, Inconel, ITO, Monel, MoS2, MoST, MoSi2, NiCr, NiCrAlY, NiTi, Permalloy, Stainless Steel, TiAlV, TiB2, WS2, ZnS, ZrB2. • Multilayers • Synthesis of the non-transferable material on the surface www.greseminnovation.com

10. Substrate Materials • Plastic • Steel • Ceramics • Any alloys incl. heat labile • Graded compositions • Co-deposited coatings • Some optical coatings • Ceramics www.greseminnovation.com

11. Contacts 10G Starokyivska str.Office 50104116 Kyiv, Ukraine tel/fax +380442216725 office@greseminnovation.com www.greseminnovation.com