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SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity

SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity. SEMI Equipment Performance Standards Integration. Sal DiIorio Semi-Tech Group sdiiorio@semitechgroup.com. Equipment Performance Metrics Process. Factory sources (automated and/or human) provide the inputs

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SEMICON West 2006 STEP Methods to Measure/Improve Equipment Productivity

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  1. SEMICON West 2006 STEPMethods to Measure/Improve Equipment Productivity SEMI Equipment Performance Standards Integration Sal DiIorioSemi-Tech Group sdiiorio@semitechgroup.com

  2. Equipment Performance Metrics Process • Factory sources (automated and/or human) provide the inputs • Standards define the process and equations • Metrics are output consistently • Same meaning for all metrics regardless of location Metrics Factory Data SEMI Standard SemiCon West 2006

  3. Factory Data Sources • Automated Systems • Production data, state history • Equipment Maintenance and state history • Equipment Cell Controllers • Equipment E116 or E58 state information • Non-automated Systems • Manual state change histories • Manual input to support E58 • Other state and history logs SemiCon West 2006

  4. Eq. Performance Standards Relationship SemiCon West 2006

  5. E10 RAM • Central to all Equipment Metrics Standards • First developed in 1986 and continuously improved to meet new requirements of the semiconductor industry • Defines the basic equipment states and metrics which act as input to other performance metrics • E79 Overall Equipment Efficiency • E35 Cost of Ownership • E124 Factory Level Productivity SemiCon West 2006

  6. E10 Process SemiCon West 2006

  7. E116 Process SemiCon West 2006

  8. Mapping the States NON-SCHEDULED (MES) AND ANY STATE* (EPT) MANUFACTURING (MES) AND BLOCKED (EPT) ENGINEERING (MES) AND BLOCKED (EPT) UNSCHEDULED DOWN (MES) AND ANY STATE* (EPT) SCHEDULED DOWN (MES) AND ANY STATE* (EPT) ENGINEERING (MES) AND BUSY (EPT) ENGINEERING (MES) AND IDLE (EPT) MANUFACTURING (MES) AND IDLE (EPT) MANUFACTURING (MES) AND BUSY (EPT) E10 States NON-SCHEDULED TIME UNSCHEDULED DOWNTIME SCHEDULED DOWNTIME ENGINEERING TIME STANDBY TIME PRODUCTIVE TIME *ANY STATE (EPT) means that the EPT state is not a factor in determining the E10 state. SemiCon West 2006

  9. E58 Process SemiCon West 2006

  10. E58 vs. E10 State Examples • Equipment tracks its own E58 state... • But… it doesn’t know its own E10 state details • User input is required, in order to provide accurate data SemiCon West 2006

  11. E58 – How it works Information exchange regarding equipment downtime state and material type. MES Operator input to trigger E58 state changes. E58 state transition Event reports. Equipment Host Computer Host input to trigger E58 state changes. Metrics SemiCon West 2006

  12. Now that we have E10 Metrics, what do we do with them? • Continuous • Improvement • Activities • Lean Mfg • TPM • RCM • 6 Sigma • Rel Eng • Etc. SemiCon West 2006

  13. Using E10 Metrics • Use them in purchase acceptance specifications • MTBFp, Uptime, MTTR, etc. • Monitor our own performance and drive continuous improvement activities • Look for improvements in metrics when new procedures or processes are implemented. • Benchmarking functions with other companies or between factories • Use them as inputs to other SEMI Standards for a better understanding of equipment COO or productivity SemiCon West 2006

  14. SEMI E35 COO • COO = The full cost of embedding, operating, and decommissioning in a factory environment equipment needed to accommodate the required volume of production units. • Among the many inputs used by E35, two come from E10 • Operational Uptime • E10 metrics (MTBF, MTTR) to calculate maintenance labor hours required for scheduled and unscheduled downtime SemiCon West 2006

  15. E79 OEE • OEE calculations are stated in terms that are consistent with SEMI E10. OEE = Availability Efficiency x Operational Efficiency x Rate Efficiency x Quality Efficiency Where E10 directly provides the values for: • Availability Efficiency = Equipment Uptime/ Total Time • Operational Efficiency = Production Time/ Equipment Uptime • Rate Efficiency = Theoretical Production Time for Actual Units / Production Time • Quality Efficiency = Theoretical Production Time for Effective Units / Theoretical Production Time for Actual Units Notes: Production Time is not defined in E10, but happens in Productive Time. Rate Efficiency x Operational Efficiency = Performance Efficiency SemiCon West 2006

  16. The Relationship Between OEE and E10 SemiCon West 2006

  17. E79 Process In addition to OEE several other efficiencies are also defined to enable users to assess more specific aspects of equipment productivity. Other data can come from MES or other Factory sources. SemiCon West 2006

  18. What is needed to determine E10 State? SemiCon West 2006

  19. What is needed to calculate E10 Metrics? SemiCon West 2006

  20. What data do people capture worst? Transition from STANDBY to PRODUCTIVE Transition from PRODUCTIVE to STANDBY Transition to UNSCHEDULED DOWNTIME Wafer/Cycle Counts Failures Cluster Tool Module level states What data do people capture best? Transition to and from SCHEDULED DOWNTIME NON-SCHEDULED time Reason for Failures Equipment dependent vs. non-equipment dependent Transition and reasons for Maintenance Delay Automation vs. Manual Data Collection SemiCon West 2006

  21. What data does automation capture worst? Transition to and from SCHEDULED DOWNTIME NON-SCHEDULED time Reason for Failures Equipment dependent vs. non-equipment dependent Transition and reasons for Maintenance Delay What data does automation capture best? Transition from STANDBY to PRODUCTIVE Transition from PRODUCTIVE to STANDBY Transition to UNSCHEDULED DOWNTIME Wafer/Cycle Counts Failures Cluster Tool Module level states Automation vs. Manual Data Collection SemiCon West 2006

  22. Is automation absolutely necessary? • Automation is superior for the following: • Accurate data regarding Productive / Standby time • More accurate OEE Operational Efficiency values • Accurate data about cluster tool module level state • Essential for CT RAM and CT OEE metrics • Accurate quantitative data about units processed and other parametric data for scheduling maintenance. • Some level of automation is absolutely preferable, even if limited. SemiCon West 2006

  23. Do we really need automation? • Yes, primarily if: • Detailed information is absolutely required. • CT RAM and OEE metrics • The cost of implementing and supporting automation can be justified. • Full automation requires large investments in HW, SW and IT and is never “done”; it continually needs updates and ongoing commitment of resources (people and $$$). • Lesser degrees of automation can provide significant improvements in data accuracy. • MES and CMMS (CIM) systems provide excellent sources for E10 data. SemiCon West 2006

  24. What if full automation is not possible? • Equipment level E10 metrics can be maintained. • Daily and Weekly summaries can be analyzed. • Look for changes and trends • Equipment to equipment • Time period to time period • Simple OEE metric may be possible. • Even if detailed rate and quality data are not available • COO calculations are still meaningful. SemiCon West 2006

  25. Conclusions • SEMI equipment performance metrics standards work together to provide meaningful information about the RAM, utilization, productivity, and COO of semiconductor equipment. • While high levels of automation are required for the most accurate data and many detailed metrics, manual data can still provide useful information. • For newer, multi-billion dollar factories the return provided by small increases in productivity may quickly exceed the cost of automation. • Older, smaller factories can achieve meaningful results with less automation, as long as absolute accuracy is not needed. SemiCon West 2006

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