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North America (N.A.) TC Chapter of the Liquid Chemicals Global Technical Committee

Detailed breakdown of key updates, leadership changes, meeting summaries, and upcoming activities of the North America Liquid Chemicals Technical Committee Liaison Report from December 2015. Includes Task Force reports and meeting schedules. Reach out to James Amano at SEMI to participate in activities.

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North America (N.A.) TC Chapter of the Liquid Chemicals Global Technical Committee

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  1. North America (N.A.) TC Chapter of the Liquid Chemicals Global Technical Committee Liaison Report December 2015 v1

  2. Outline • Leadership • Organization Chart • Meeting Information • New Activities • Ballot Review Summary • Upcoming Ballots • Task Force Reports • Next Meeting Schedule

  3. Leadership • N.A. Liquid Chemicals TC Chapter Cochairs • Frank Flowers / PeroxyChem • Leadership Changes • Frank Parker / ICL Performance Products has stepped down as Co-Chair

  4. N.A. Liquid Chemicals TC Chapter Organization North America Liquid Chemicals Technical Committee Chapter C: Frank Flowers (PeroxyChem) Liquid Chemicals Subcommittee C: Frank Flowers (PeroxyChem) Liquid Chemicals Distribution Subcommittee C: Open High Purity Liquid Assemblies & Systems TF L: David Kandiyeli (Mega Fluids Systems) L: Koh Murai (Mega Fluids Systems) Determining Roughness of Polymer Surfaces TF L: Gunter Moeller (Arkema Group) Analytical Methods TF L: Frank Flowers (PeroxyChem) UPW Filter Performance TF L: SlavaLibman (Air Liquide) SEMI F40 Rewrite TF L: Don Hadder Jr. (Intel) High Purity Materials & Components TF L: James Henry (Arkema Group) L: Ian Francisco (Lam Research) SEMI F63 Rewrite TF L: Slava Libman (Air Liquide) SEMI IX Resin TF L: Slava Libman (Air Liquide)

  5. Meeting Information • Last meeting • November 3, 2015 at N.A. Standards Fall 2015 Meetings • SEMI Headquarters in San Jose, CA • Next meeting • April 5, 2015 at N.A. Standards Spring 2016 Meetings • SEMI Headquarters in San Jose, CA

  6. New/Revised Activities

  7. New Activities

  8. Ballot Review Summary

  9. Current Ballots PlannedCycle 1, 2016

  10. Task Force Updates [1/5] • Analytical Test Methods TF • The TF reviewed Doc. 5831A, Revision to SEMI C27-0708, Specifications and Guideline for Hydrochloric Acid with title change to: Specification and Guide for Hydrochloric Acid • Ballot failed by committee and sent back the TF for rework

  11. Task Force Updates [2/5] • SEMI F57(Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems) Revision / ITRS Alignment / F40 Rewrite TF • TFOF revised – name is now F57 Revision TF renamed as the High Purity Materials & Components TF • Determining Roughness of Polymer Surfaces TF • Published New Standard: SEMI C87-0515 Test Method for Determining Roughness Of Polymer Surfaces Used In Ultrapure Water and Liquid Chemical Distribution Systems By Contact Profilometry

  12. Task Force Updates [3/5] • High Purity Liquid Assemblies & Systems TF (Previously SEMI, F39, F41 Rewrite TF) • Reviewed the F41 revision draft, which was presented to the TC Chapter

  13. Task Force Updates [4/5] • SEMI F63 (Guide for UPW) • The TF is reviewing SEMI F63, which is due for five-year review. A revision ballot will be issued in Cycle 1-2016 • UPW Filtration Efficiency TF • The TF discussed the particle size overlap issue between F110 and Japan Document 5421A approved and in publication.

  14. Task Force Updates [5/5] • SEMI IX (Ion Exchange) Resin TF • Document 5621C (New Standard: Guide for Determining the Quality of Ion Exchanged Resin Used in Polish Applications of Ultrapure Water System) approved by TC as a Preliminary Standard at Nov. 3 meeting • Subsequently approved by GCS Dec. 10 • Next step: Audits and Reviews Subcommittee Procedural Review

  15. Upcoming Meeting Schedule The next N.A. Liquid Chemicals Standards Meetings are tentatively scheduled for April 4 and 5, 2016 at SEMI Headquarters in San Jose, California in conjunction with the N.A. Standards Spring 2016 MeetingsMonday, April 4*– E49.2 / E49.7 Review/Rewrite TF (9:00 AM to 10:30 AM) – E49.4 / E49.5 Evaluation TF (10:30 AM to 12:00 Noon) – Ion Exchange (IX) Resin TF (2:00 PM to 3:00 PM) – UPW Filtration TF (3:00 PM to 5:00 PM)Tuesday, April 5*– Joint High Purity Materials & Components TF/F40 Rewrite TFs (9:00 AM to 10:00 AM) – High Purity Liquid Assemblies & Systems TF TF (10:00 AM to 11:00 AM) – Analytical Methods TF (11:00 AM to 12 Noon) – N.A. Liquid Chemicals TC Chapter (2:00 PM to 5:00 PM)*All times are in Pacific time.

  16. Thank You! For more information or to participate in any N.A. Liquid Chemicals activities, please contact James Amano at SEMI (jamano@semi.org)

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