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Finite element modeling and modal analysis of micromechanical gyroscope sensitive element. 3D model. Finite element modeling and modal analysis of micromechanical gyroscope sensitive element. 3D FE model. NE = 3328 NDF = 88416. y. x. z.
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Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element 3D model
Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element 3D FE model NE = 3328NDF = 88416
y x z Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element First natural mode Second natural mode F1 F2
y x z Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element Displacements Ux Ux
y x z Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element Displacements Uy Uy
y x z Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element Displacements Uz Uz
Finite elementmodeling and modal analysisof micromechanical gyroscopesensitive element Influence of deformed state arising at sensitive element manufacturing on a spectrum of natural frequencies