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Micormachine: #2 (Oct. 9)

Micormachine: #2 (Oct. 9). １． Various applications of micromachines - Information input - Information output - Telecommunications - Medicine - Biotechnology - Precise measurement - Power generation - Others 2. Health information system using wearable sensors.

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Micormachine: #2 (Oct. 9)

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  1. Micormachine: #2 (Oct. 9) １．Various applications of micromachines - Information input - Information output - Telecommunications - Medicine - Biotechnology - Precise measurement - Power generation - Others 2. Health information system using wearable sensors

  2. Invention of Integrated Circuits by Jack Kilby http://www.ti.com/corp/docs/kilbyctr/jackstclair.shtml

  3. The First IC In 1958, at Dallas R&D Center if Texas Instruments 7/16 x 1/7 (inch)2 On a germanium substrate http://www.ti.com/corp/docs/kilbyctr/jackstclair.shtml

  4. Micromotor

  5. Microphone

  6. Fingerprint Sensor Shigematsu et al, NTT Labs.

  7. Fingerprint Sensor

  8. Thermal Machining Schematic Structure SEM

  9. Miniature Display Using Micromirrors Fast mirror -- 550 mm minor axis Driven at resonance (6.2 kHz) Slow mirror -- driven at videorefresh rate of 20 Hz R.A. Conant, et al., "A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers '99, Sendai, Japan, June 1999, pp. 376-379.

  10. Micro Display for Virtual Reality R.A. Conant, et al., "A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers '99, Sendai, Japan, June 1999, pp. 376-379.

  11. Telecommunication： Optical Switch

  12. Structure of Optical Switch M. Makihara, et al., J. Lightwave Tech. Vol. 17. No. 1, pp. 14-18, 1999.

  13. Medicine： Micro Syringe Optical fiber Silicon wafer 800 mm Needle made of SiO2 OKa, et al., Kagawa University

  14. Micro Gas Flow Sensor Response time： 2 ms Resolution： 1 mm/sec Small size：1.7 mm2 Sensing range：0～10，0～30 m/sec Low power consumption：Battery operated

  15. Micrograph of Micro Gas Flow Sensor Sensor Heater Sensor

  16. SEM of Micro Gas Flow Sensor

  17. Micro Gas Sensor H. Baltes, et al., IEEE Spectrum, September, pp. 35-38, 1998.

  18. DMD Pixel Structure

  19. Projection Display Using DMD

  20. Surface-Conduction Emitter Display

  21. Watch: Typical Wearable Instrument • - Usually people are not aware of wearing • - Attached on human skin • Works continuously • Linked to time information • - Other wearable things: ring, glasses

  22. Pressure Sensor Vacuum Vacuum →Air pressure, altitude, water depth Silicon Silicon

  23. Wearable Pulse Oximeter Non-invasive and real-time measurement of oxygen concentration in blood

  24. Liquid Injection Device C. H. Mastrangelo, M. A. Burns and D. T. Burke, IEEE Proceedings, Vol. 86, No. 8, pp. 1769-1787.

  25. Microfluid Device Using Si and Plastic C. H. Mastrangelo, M. A. Burns and D. T. Burke, IEEE Proceedings, Vol. 86, No. 8, pp. 1769-1787.

  26. Images of Sensor Network Applications Security Disaster Prevention Medicine, Health Environment Others Agriculture Source: Ministry of Public Management, Home Affairs, Posts and Telecommunications

  27. Ubiquitous Sensor Network Concept Sensing Sensing Sensing Analog/digital signal processing Analog/digital signal processing Analog/digital signal processing RF transceiver RF transceiver RF transceiver (Sensor module) (Sensor module) (Sensor module) Network module Internet PC Wireless link Sensing Sensing Sensing Analog and digital signal processing Analog/digital signal processing Analog/digital signal processing RF transceiver RF transceiver RF transceiver (Sensor module) N-interfacer (Sensor module) (Sensor module)

  28. Block Diagrams 303.825 MHz RS232C PC MPU SRAM RF transceiver chipset Base board RF controller RF board USB Power regulator Power regulator ADC Oscillator Ether Base board Sensor Optional Battery Battery (a) (b)

  29. Sensor Network Using Ni3 Sensor module (Ni3) Network module

  30. 腕時計のケースに入れたNi3

  31. Healthcare System Using Wearable Sensors Electroencephalograph Rheometer Medical institutions Fire stations Eyeball movement sensor Cardiograph Information browser for cliants Internet Vibration Send information by radio Server for wearable PC Vital data, Warning Acceleration sensor （admission, secure communication） ・Dispersion to different kinds of instruments ・Security ・General purpose search engine Health care system Pulseoxymeter Wearable PC (with a built-in PHS） Vital data management system Muscle-sound sensor Skin thermometry sensor Skin conductivity sensor Body-movement- accelerometer Micro vibration accelerometer ・accumulation and management of vital data ・correlation analysis of actions, living bodies, and environmental information ・management of attributed data about actions and health Feet pressure sensor

  32. Current Status of Wearable Sensors

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