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POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY. Chuanfeng Liu Supervisors: Andrew Martin EGI KTH Aapo Sääsk Xzero AB Henrik Dolfe Xzero AB. Heat and Power Technology, Stockholm, Sweden.

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POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY

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  1. POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY Chuanfeng Liu Supervisors: Andrew Martin EGI KTH Aapo Sääsk Xzero AB Henrik Dolfe Xzero AB Heat and Power Technology, Stockholm, Sweden

  2. Content • Objectives of thesis • Current UPW system in semiconductor industry • Principle of air gap membrane distillation • Xzero test facility of Air Gap Membrane Distillation • Integrated MD in cogeneration cycle • Conclusion Heat and Power Technology, Stockholm, Sweden

  3. Objectives • Integrate MD technology into traditional heat and power cogeneration cycle to produce UPW for semiconductor industry • Theoretical study of membrane distillation • Experimental study of air gap membrane distillation • Economic analysis

  4. UPW Consumption in Semiconductor Industry • 50% of total UPW market worldwide. • More than 6000 liters UPW for one eight-inch wafer • 1.4-4.8 million liters UPW per day • The cost of a UPW system in a fab is more than $10 million. Heat and Power Technology, Stockholm, Sweden

  5. Present UPW Production System • Reverse osmosis (RO) and Electro-deionization (EDI) • 10-20 KWH per cubic meter UPW • 2-3MW-- 6% of total fab energy consumption Heat and Power Technology, Stockholm, Sweden

  6. Make-up Section Raw Water Tank Multi Media Filter Carbon Filter Heat Exchanger Cartridge Filter Cartridge Filter UV System Primary Mixed Bed Exchange Degas Break Tank with Nitrogen Blanket Reverse Osmosis and EDI Reject To Polishing Loop Section

  7. UPW Polishing Loop Section From Make up section UPW Water Tank With nitrogen blanket TOC UV Heat Exchanger Polishing Mixed Bed Ion Exchange UPW return line Fab Tool Use Ultra Filter Cartridge Filter Germicidal UV Drains & Rinse

  8. Principle of Membrane Distillation Membrane Hot Side Cold side

  9. Advantages of MD • 100% (theoretical) rejection of non-volatile matters • lower operating temperatures • lower operating pressure • reduced chemical interaction • reduced vapor spaces compared distillation processes Heat and Power Technology, Stockholm, Sweden

  10. Flow Diagram Of Xzero Test Facility

  11. Computer Simulation of Membrane Distillation Module emplyed in Aspen Utilites

  12. Integrated Cogeneration of MD in the Semiconductor Industry • The power requirement of one typical semiconductor fabrication plant is equal to what 7500 single-family homes consume. • The average power consumption for the fab is 2.18 KW/m2, and the average cooling load is 1.53 KW/m2.

  13. Combined Heat Recovery Chiller With MD Units Waste Heat From Fab

  14. Combined MD With Waste Heat From Fab • Total 35-40 MW • Air conditioner system 4-5MW • Condenser side 12 MW • 20,000 l/hour possible with readily available waste heat sources • About 1/3 of fab UPW requirement

  15. Integrated MD With Power Production • 36 Mwei (fab electricity demand covered ) • 48,000 L/hr (2/3 UPW demand)

  16. Conclusion • Polygeneration is promising in semiconductor industry. • With CHP and waste heat utilization , up to 65 m3/hr UPW possible for a fab with 5000 wafers production per week. • Capital cost is around $3 per cubic meter UPW.

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