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GaN LED with Ion Implanted Cold Zone. 班級 : 碩研電子二甲 姓名 : 陳詠升 授課教師 : 蔣富成. Device Fabrication. ICP-RIE. grown by MOCVD. Ni. Ni. P-GaN 0.16um. MQW 5 periods of InGaN/GaN. N-GaN 2um. Undope GaN. Sapphire. Schematic Sketch of the Fabricated. Status: Ion Energy : 180 keV
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GaN LED with Ion Implanted Cold Zone 班級:碩研電子二甲 姓名:陳詠升 授課教師:蔣富成
Device Fabrication ICP-RIE grown by MOCVD Ni Ni P-GaN 0.16um MQW 5 periods of InGaN/GaN N-GaN 2um Undope GaN Sapphire
Schematic Sketch of the Fabricated Status: Ion Energy : 180 keV Concentration : 1.5x1013 cm-3 Selective Area Activation N2 ambient 750°C for 30 min Si ion implantation Ni Ni-mask Ni ITO Ni Ni P-GaN CBL
Compare with Conventional LED L conventional R = (L *ρ)/A L ion implantation
I-V Characteristic 6.7V 7.1V
Heat generated can be dissipated into the ion-implanted cold zone Junction Temperature-Injection Current Density 37° →60.6° 34.8 ° →39°
Due to a smaller effective light emitting area
Conclusion 1. Vf of ion implanted LED is slightly lower than that of conventional LED。 Advantage: 2. Re-distribution of carrier and temperature enhances efficient light emission。 3. Efficient heat transfer to the ion implanted cold zone。 4. Reduce internal temperature to improve the reliability 。
Reference • 1. Yun-Wei Cheng, Hung-Hsien Chen, Min-Yung Ke, Cheng-Pin Chen, Jian Jang Huang “Effect of selective ion-implanted p-GaN on the junction temperature of GaN-based light emitting diodes” Optics Communications, Volume 282, Issue 5, 1 March 2009, Pages 835-838 • 2. Lin, R.-M.; Jen-Chih Li; Yi-Lun Chou; Kuo-Hsing Chen; Yung-Hsiang Lin; Yuan-Chieh Lu; Meng-Chyi Wu; Hung, H.; Wei-Chi Lai, “Improving the Luminescence of InGaN–GaN Blue LEDs Through Selective Ring-Region Activation of the Mg-Doped GaN Layer, ” Photonics Technology Letter, IEEE Vol.19 June 15, 2007 Page:928-930. • 3. M.A. Tsai, P. Yu, J.R. Chen, J.K. Huang, C.H. Chiu, H.C. Kuo, T.C. Lu, S.H. Lin, S.C. Wang, “Improving Light Output Power of the GaN-Based Vertical-Injection Light-Emitting Diodes by Mg+ Implanted Current Blocking Layer ” Photonics Technology Letters, IEEE Volume 21, Issue 11, June1, 2009 Page(s):688 – 690