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Supported File Formats. WAFERMAP. We add customer imports upon request. Award winning software package Collect, edit, visualize and analyze measured physical parameters on semiconductor wafers. Import data from various metrology tools Ellipsometers 4 point probes Thickness gauges.
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Supported File Formats WAFERMAP We add customer imports upon request • Award winning software package • Collect, edit, visualize and analyze measured physical parameters on semiconductor wafers • Import data from various metrology tools • Ellipsometers • 4 point probes • Thickness gauges
WAFERMAP • 9 different visualization plots from 1D to 3D • Data operations and filtering • File comparison • Statistical Process Control SPC • Browser • Trend chart • Inter-application Communication (Active X)
WAFERMAP New Release: Version 3.0 • New features: • New easy to use XML-based Boin file format • Multiple wafers and multi-measurements in one file • Import of multi-measurement wafers at once • Free rotation of 3D plots
WAFERMAP New Release: Version 3.0 • New features: • Export of *.jpg and *.bmp • Export of *.html • … and many more
WAFERMAP • Compare your measurements • Work off-line • Work outside the clean room • WAFERMAP is your choice
WAFERMAP References – Partial List of WAFERMAP Customers • Advanced Micro Devices • ASM • Atmel • Canon • Hitachi • Hypernex • Infineon • Intel • Jordan Valley SC • LSI Logic • Mattson Technology • Motorola/ Freescale • Nicolet • Osram • Philips, Philips Analytical • Mitsubishi • Seagate • Sematech • ST Microelectronics • Sumitomo Eaton Nova • Silicon Valley Group • Thermawave • Tokyo Electron • Tru-Si • Varian
WAFERMAP References – OEM Customers • Cyrium • Foothill Instruments • Jenawave • Jordan Valley • KLA - Tencor • LayTec • Napson • Sigmatech • SOPRA • Technos • Tepla AG • Thermawave • Thermo Electron • Carl Zeiss • Sell WAFERMAP as analysis and visualization tool together with your equipment
Thank you very much for your interest in WAFERMAP