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Terrestrial short wavelength metrology for solar science

Terrestrial short wavelength metrology for solar science. Focus of research: EUV sources & metrology Industrially relevant EUV applications Reflectometry Nanostructuring Imaging. Reflectometer. High power EUVL source. High brightness metrology source. Laboratory exposure tool.

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Terrestrial short wavelength metrology for solar science

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  1. Terrestrial short wavelength metrology for solar science • Focus of research: • EUV sources & metrology • Industrially relevant EUV applications • Reflectometry • Nanostructuring • Imaging Reflectometer High power EUVL source High brightness metrology source Laboratory exposure tool Defect inspection microscope Stefan Herbert Scientific Detector Workshop 2013 9th October 2013, Florence, Italy

  2. Terrestrial short wavelength metrology for solar science • Motivation ofattendance: • Space scienceapplicationsand EUV lithography/metrologyshare: • Vacuum- andcleanlinenessrequirements - highestqualitystandards • Challenges, connectedwith EUV-specificopticalequipmentanddetectors • Combine competencesandexperiencesfor mutual benefit • Contributionforjointactivities: • Plasma sourcewith quasi-solar emissionspectrum • Flexible metrologytestbenchforcharacterizationofoptics& detectors in theEUV • Outgassing studies in vacuum Stefan Herbert Scientific Detector Workshop 2013 9th October 2013, Florence, Italy

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