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(a) (b)

(a) (b). (a) (b). SCS. Thick resist. LTO. Wet ox. Fig 1:. lowSCS. upperSCS. highSCS. upperSCS. highSCS. lowSCS. SOI device layer frontside. upperSCS. 2. 1. 1. highSCS. 3. lowSCS. SOI device layer backside. Fig 2. Torsional suspension upperSCS beam. Low-mass mirror.

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(a) (b)

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  1. (a) (b) (a) (b) SCS Thick resist LTO Wet ox. Fig 1:

  2. lowSCS upperSCS highSCS

  3. upperSCS highSCS lowSCS

  4. SOI device layer frontside upperSCS 2 1 1 highSCS 3 lowSCS SOI device layer backside Fig 2

  5. Torsional suspension upperSCS beam Low-mass mirror Back-side etched cavity lowSCS Actuating arm Lateral actuation Pushing or pulling force

  6. Fig 3: DC response of push/pull-mode mirror

  7. Fig 4: Frequency response of push/pull-mode mirror

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