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CMP Water Recycling

CMP Water Recycling. Dr. Russ Parker Hewlett Packard Laboratories Based on a system designed at the ULSI Fab, Palo Alto, CA  1999 Arizona Board of Regents for The University of Arizona. Why CMP? Why Recycle?. CMP processing can use approximately 1/3 of all water consumed in a fab.

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CMP Water Recycling

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  1. CMP Water Recycling Dr. Russ Parker Hewlett Packard Laboratories Based on a system designed at the ULSI Fab, Palo Alto, CA  1999 Arizona Board of Regents for The University of Arizona

  2. Why CMP? Why Recycle? • CMP processing can use approximately 1/3 of all water consumed in a fab. • The great majority of water from the area has virtually no contamination in it. • Recycling is becoming a way of life. The main issue is how to implement recycle for maximum recovery and security.

  3. Previous Recycling Spent Rinsewaters Typical UPW System Fab 450 gal. TOC, Ohms ? AWN TOC, Ohms 254 nm UV 30,000 uW ? Cation Exchange Anion Exchange Carbon Bed RO Storage Tank 3000 gal. Return

  4. Operations with CMP Water • Polishers (Strausbaugh) (3-6 gpm) • Scrubber (0.5 gpm) • Chemical Clean Rinses (15 gpm) • Staging Tanks (5 gpm) • Rinser/Dryers (4 gpm) No Recycle? Yes

  5. What’s in the Water? • Slurry (a few types) • Ammonia (0.5 gram) • Hydrogen peroxide (0.5 gram) • Hydrochloric Acid (0.5 gram) • Iron, Copper (ppm) • Resist & Dielectric (ppm) • Particles (?) • Others in Trace Amounts

  6. Polish Tables Staging CMP Water Paths-- A Recycler’s View Fluoride and Metals Caking Parts Cleaning S R D SC-1 SC-2 Rinse SC-1 Rinse SC-2 Scrubber Chemistry and Rinses ? Recycle System AWN

  7. Polisher Water Flow Spray Nozzles ReceivingTank Receiving Tank Polishing table Polishing table Dog dish Sending Tank Waste Drain

  8. Recycling with CMP AWN Spent Rinsewaters Typical UPW System Fab 450 gal. TOC, Ohms ? AWN TOC, Ohms 254 nm UV 30,000 uW ? Cation Exchange Anion Exchange Carbon Bed RO Storage Tank 3000 gal. Return

  9. What Happens to CMP Recyclable Water? The Recycle System treats CMP water containing: • Ammonia - evaporation or cation resin • Hydrogen peroxide - activated carbon • Hydrochloric Acid - anion resin • Iron, Copper - resin • Resist & Dielectric - filters • Particles - filters • Others in Trace Amounts - resins • Slurry - ??

  10. Benefits of Loop Recycle vs. Local • Returning to the house recycle system provides quality assurance. • 6 ion exchange beds, 4 UV lamps, 3-4 filters • Only one supply line and one collection line are needed. • Purity is not a question because the quality is controlled by the house system. • No new tanks, filters, or treatment • Massive dilution avoids events, provides lots of reaction time • Easy install - collection line and tie-in point as opposed to new equipment

  11. Slurry Waste from CMP - Part 1 • Is mixed with other site regulated wastes • Contains silica, alumina, iron, hydrogen peroxide, potassium hydroxide, ammonium hydroxide, and other slurry mix items • Contains copper, tungsten, aluminum, resist, dielectric • Collects (somewhat) in a holding tank to an equilibrium level, then is transferred as it arrives

  12. Slurry Waste from CMP - Part 2 • Is collected in a vat • Is mixed with metal rinses from the site • Is mixed with CaCl2, caustic, floc • Is allowed to settle • Sludge goes to a caker • Supernatant and squeeze-out go to resins • Discharge liquid goes to Acid Waste Neutralization (AWN)

  13. Summary • The system results in almost all of the rinse/idle water in the CMP process being recycled (except for water directly from polishers due to heavy silica loading). • Maximum water quality is assured because the recycled water goes to the RO product tank. • The use of recycling results in the avoidance of some additional equipment scale-up to meet further UPW demands. • Slurry waste is efficiently handled by an existing Metals/Fluoride caking system.

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