Common PQ Issues and Solutions

1. Common PQ Issues and Solutions Mark Stephens, PE, CEM, CPEnMSSenior Project ManagerIndustrial PQ and Energy EfficiencyElectric Power Research Institute Phone 865.218.8022 mstephens@epri.com

2. EPRI Semiconductor PQ Experience Semiconductor Plant PQ Audits Albany Nanotech, Albany, NY Asahi Kasei Microsystems, Japan AUO, Hsinchu, Taiwan Chartered Semiconductor, Singapore ChiMei Optoelectronics Corp, Tainan, Taiwan Confidential Semiconductor Site, Chandler, AZ Confidential Semiconductor Site, Philippines HP, Singapore IBM, Burlington, VT IBM, East Fishkill, NY International Rectifier, Temecula Kyocera,Kagoshima,Japan Lucent Technologies, Allen Town, PA LSI Logic, Colorado Freescale/Motorola, Ed Bluestien, Austin, TX Freescale/Motorola, Oak Hill , Austin, TX Motorola, Irvine, CA Motorola, Mesa, AZ Philips Semiconductor, San Antonio Qimonda, Sandston, VA Sony Semiconductor, San Antonio, TX SSMC, Singapore ST Microelectronics, San Diego ST Microelectronics, Singapore Winbond Semiconductor Plant, Hsinchu, Taiwan OEMs (SEMI F47 Testing) ABB Robotics Accent Optical Advanced Energy Alcatel Rockwell Automation Applied Materials ASM ASML Axcelis Carrier CFM Technologies CTI Densei-Lambda DurrAutomation ESI FanucRobotics FSI International Ibis Johnson Controls Johnson Controls, York, PA KLA-Tencor KukaRobotics Lambda EMI Mattson Technologies McQuay International Meiden Power Solutions OEMs (SEMI F47 Testing) 27. Mitsubishi 28. Novellus 29. Phoenix Contact 30. Powertron 31. PULS Power 32. Reliability, Inc. 33. Rudolph Technologies 34. Schlumberger 35 Schneider Electric 35. SCP Global Technologies 36. SEMATECH 37. Semitool 38. Siemens 39. SVG Lithography 40. SVG Thermco 41 Tokyo Electron Austin (TEA) 42. Tokyo Electron Kyushu (TKL) 43. Tokyo Electron Massachusetts (TEM) 44. Trane 45. Varian Semiconductor Equipment Associates, Inc. 46. York

3. Importance of Power Quality • What happens to this Ion Implanter process when a power quality problem occurs? • Who is to blame? • How do we work together to fix the problems?

4. Interrelated Processes

5. Outage or Sag ?

6. Typical Recloser Schemes

7. Targeting by Cause Three Phases 13% Two Phases 19% One Phase 68% Source: EPRI Distribution Power Quality Study

9. Is it the Plant Equipment’s Fault? 4 Year Data Example Fed from Dedicated DistributionNetwork 5 Year Data Example Fed from Dedicated SubstationFrom TransmissionNetwork

10. Important Realization • Utilities Share Responsibility • Tree Trimming, Lighting Arrestors, Grounding, Maintenance, Provide PQ information to industrials, etc • Understand PQ Environment of Grid • Industrials Share Responsibility • Understanding Equipment Vulnerability, PQ Specifications, Power Conditioning, Proper Wiring/Grounding, etc • Understand PQ Environment at Site • Most effective solutions are reached when both sides work together to see what can be done

11. Protecting Processes Against Voltage Sags

12. Protecting Equipment Against Voltage SagsInstalled Process Equipment • The goal of improving installed process equipment is to improve the overall voltage sag tolerance of the machine • Four common approaches have been proven to to be effective at protecting installed process equipment • Facility Level • Panel Level • Equipment/Machine Level • Control Level

13. Protecting Equipment Against Voltage SagsInstalled Process Equipment Economics Drive the Approach

14. Protecting Equipment Against Voltage SagsInstalled Process Equipment • Facility-level Solutions are targeted at protecting an entire facility and can be very costly ($500k - $$M+) Dynamic Voltage Restorer Large Flywheel Large UPS

15. Protecting Equipment Against Voltage SagsInstalled Process Equipment • Panel-level Solutions are targeted at protecting loads fed from a common circuit (Panel or Branch) $100k - $500+

16. Protecting Equipment Against Voltage SagsInstalled Process Equipment • Machine-level Solutions are targeted at protecting one machine ($20k - $200k)

17. Protecting Equipment Against Voltage SagsInstalled Process Equipment • Control-level solutions are targeted at protecting only the most sensitive components, most cost effective solution ($100 - $5,000)

18. Generalized Example: Control Level to Equipment/Machine Level Cost vs. Coverage + +

19. Embedding the Solution

20. Techniques to Improve Voltage Sag Tolerance of Process Equipment New Equipment in Design Phase • Specify Compliance to PQ Standards (such as SEMI F47) • Design with DC Power • Use Sag-Tolerant Components • Select Appropriate Trip Curves for Circuit Breakers Existing Equipment • Provide Conditioned Power for AC Control Circuits • Provide Backup Power for DC Buses Either Existing or New Equipment • Apply Custom Programming Techniques • Drive Configuration Settings

21. Specify Voltage Sag Standards in Purchase Specs ( such as SEMI F47)

22. Design with DC Power • Utilize SEMI F47 compliant DC Power Supplies. • Whereas control power transformers (CPTs) and AC components do not have inherent energy storage to help them ride through voltage sags.

23. DC Powered Emergency Off Circuit Design with DC Power • One of the best methods of increasing the tolerance of control circuits is to use direct current (DC) instead of alternating current (AC) to power control circuits, controllers, input/output devices (I/O), and sensors. • DC power supplies have a “built-in” tolerance to voltage sags due to their ripple-correction capacitors, whereas control power transformers (CPTs) and AC components do not have inherent energy storage to help them ride through voltage sags • Many OEMs are moving in this direction to harden their equipment designs DC Powered PLC Circuit

24. Use Sag-Tolerant Components • Require that all electrical components and subsystems meet SEMI F47 or other recognized voltage-sag standards

25. Ride-Through Adjustments on AC Drives • Depending on the setting of the drive’s undervoltage trip point and the severity of the sag, the drive may trip after the DC bus decreases below the undervoltage trip point. • Sometimes, the voltage-sag tolerance of drives can be increased through parameter settings, including restart options • Example AC Drive Parameters that could improve ride-through are; • Automatic Reset and Restart Functions • Motor- Load Control Functions (Flying Restart) • Phase-Loss and DC Bus Undervoltage Functions • Acceleration / Deceleration / Current / Torque - Limits

26. Reported Approaches for Semiconductor Plant Voltage Sag Mitigation Strategies • Facility Wide – Centralized UPS for critical loads in the fab. • Distributed Approach - mitigate voltage sags on a tool-by-tool basis. Local UPS ranging from of 30 to 80kVA. • Control Level Approach - This approach requires that the OEM/fab conditions the sensitive circuits that need power conditioning within each tool or subsystem. • No Organized Approach – No plan. • Partnership with Utility - key to making iterative improvements. REF: Impact of SEMI F47 on Utilities and Their Customers, EPRI, Palo Alto, CA: 2004. 1002284.

27. Summary • It’s a team effort to solve these problems, the utility, industrial/commercial, and sometimes consultants need to come together. • Understanding why your equipment is vulnerable is paramount. You can’t fix a problem without understanding the true cause. • Moving forward (sometimes with some simple modifications) you can make production systems more robust. • Don’t forget including PQ standards in your purchase specs. • Don’t assume battery based systems are required.

28. For More Information Contact Mark Stephens, PE, CEM, CP EnMS EPRI | Senior Project Manager Industrial PQ & Energy Efficiency 942 Corridor Park Blvd, Knoxville, TN 37932 Desk: 865-218-8022 Mobile: 865-773-3631www.epri.com http://f47testing.epri.com http://mypq.epri.com mstephens@epri.com