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Vacuum chuck for probe station

Vacuum chuck for probe station. contacts: Howard Wieman hhwieman@lbl.gov work: 510 495-2473 cell: 631 431-8236 Eric Anderssen ECAnderssen@lbl.gov 510 495-2821.

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Vacuum chuck for probe station

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  1. Vacuum chuck for probe station contacts: Howard Wieman hhwieman@lbl.gov work: 510 495-2473 cell: 631 431-8236 Eric Anderssen ECAnderssen@lbl.gov 510 495-2821

  2. This vacuum chuck will be used to hold and accurately locate 2 mil thick silicon chips in a probe station. It consists of two aluminum plates bonded to a SLA manufactured vacuum manifold. This is a request for the machined aluminum parts. The parts are modeled with SolidWorks 2009 Top Assembly: “vc Probe Assembly.SLDASM”

  3. machining tasks

  4. “vc probe top.SLDPRT” tolerance: top and bottom surface flat and parallel to 2 mil Finish 62min tolerance: locating edges for the silicon chips – relative location with respect to each other good to 1 mil

  5. “vc probe suction plate.SLDPRT” tolerance: top and bottom surface flat and parallel to 2 mil tolerance: capture lip radius -0 + 4 mil Finish 62min must suck down to a metal vacuum plate

  6. Max Nose Radius Max Nose radius of 0.020” Not critical

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