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LI LI Tongji University

Dispatching Rule Considering Time-Constraints on Processes for Semiconductor Wafer Fabrication Facility. LI LI Tongji University. Content. Problem description Dispatching Rule Considering Time-Constraints on Processes Simulations Conclusions. Problem Description.

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LI LI Tongji University

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  1. Dispatching Rule Considering Time-Constraints on Processes for Semiconductor Wafer Fabrication Facility LI LI Tongji University

  2. Content • Problem description • Dispatching Rule Considering Time-Constraints on Processes • Simulations • Conclusions

  3. Problem Description • Dispatching with time-constraints on the processes • the requirements on the • delivery of jobs • high utility and workload • balance of machines with time- • constraints requirements of • processes • guarantee the yields of lots • increase the movements of jobs • to utilize its capacity efficiently Figure 1 An example of a job with time-constraint

  4. Dispatching workflow The Workflow of DRTC

  5. Dispatching workflow • For non-BPM, the selection probability of job n is set to • For BPM, the selection probability of job n is set to

  6. Simulations 1 Table 1 Time-constrain of Metal Sputtering Table 2 Time-constraint of BPSG

  7. Simulations 1 P-M-Avg.: average proportion of the jobs satisfying TC-M P-B-Avg.: average proportion of the jobs satisfying TC-B MOVE -Avg.: average movements of the qualified jobs during one week Values of parameters impact the performance of DRTC critically

  8. Parameter Optimization The workflow to determine the parameter values of DRTC

  9. Simulations 2

  10. Conclusion • A dispatching rule considering the time-constraints on processes is proposed in this paper. • We also introduce how to determine its parameters to obtain better performance. • However, our work doesn’t relate these parameters to running information of a fab, and the latter is anticipated to be better than the former. • Our future work is to link these parameters with running information to realize its adaptability to changing environments.

  11. Thank You !

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