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DAFP 3D Die Map

DAFP 3D Die Map. 3D Die Map Definition 128, 256 or 512 profiles are taken in the X direction, equally spaced from each other in the Y direction Nanoscope then assembles the individual profiles into an AFM like image, the 3D Die Map

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DAFP 3D Die Map

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  1. DAFP 3D Die Map • 3D Die Map Definition • 128, 256 or 512 profiles are taken in the X direction, equally spaced from each other in the Y direction • Nanoscope then assembles the individual profiles into an AFM like image, the 3D Die Map • Once the die map has been assembled the image may be analyzed using the standard AFM analyses • The example at right is a 25 mm x 25 mm 3D Die map from the SEMATECH MIT Mask CMP wafer showing Dishing and Erosion of Cu lines in ILD.

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