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PHASED: a Faster, Smarter & More Affordable Analysis Device - Update

PHASED: a Faster, Smarter & More Affordable Analysis Device - Update. U.Bonne, J.Detry, R.Higashi, K.Newstrom-Peitso, H.Pham, T.Rezachek and S.Swanson Honeywell Labs, Plymouth, MN 55441, USA ulrich.bonne@honeywell.com.

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PHASED: a Faster, Smarter & More Affordable Analysis Device - Update

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  1. PHASED: a Faster, Smarter & More Affordable Analysis Device - Update U.Bonne, J.Detry, R.Higashi, K.Newstrom-Peitso, H.Pham, T.Rezachek and S.Swanson Honeywell Labs, Plymouth, MN 55441, USA ulrich.bonne@honeywell.com Definition: PHASED (= Phased Heater Array Structure for Enhanced Detection) presently integrates multi-stage pre-concentration, separation, flow sensing and detection of gas components on one chip. Project Objectives: Develop and demonstrate the operation of a PHASED sensor, via: - Thermophysical analysis and simulations - Design and assemble a setup to check out the individual components - Design and fabricate a preliminary version of PHASED, with PCB electronics - Design and fabricate an integrated version of PHASED-on-a-chip Acknowledgment: This work is supported by ORNL/DoE Ulrich.bonne@honeywell.com

  2. PHASED: Micro Gas Analyzer System Phased Heater Array Structure for Enhanced Detection Goal: Sensitivity <10 ppb, < 3 sec, ~ 1 in.3, < 1 J/analysis, wireless output. Ulrich.bonne@honeywell.com

  3. Cross section of PHASED structure Multi-Stage Pre-concentration PHASED: Physical Principle of Multi-Stage Pre-Concentr. Side Views of PHASED structure and Operation Multi-stage release of analyte increases its concentration: ~100-fold with 1st stage ~100 x n-fold after n stages To Separator robert.higashi@honeywell.com

  4. PHASED: Operation, Structure, Envisioned output Phased Heater Array Structure for Enhanced Detection Schematic Views of the Phased Heater Array with Individual Heaters, H1, Hn,….Hn-1, Hn, and a Thermal Conductivity Sensor, TC ulrich.bonne@honeywell.com

  5. Thermal Modeling of PHASED (cont’d.) Ulrich.bonne@honeywell.com

  6. Thermal Modeling of PHASED (cont’d.) Ulrich.bonne@honeywell.com

  7. Thermal Modeling of PHASED (cont’d.) burgess.johnson@honeywell.com

  8. PHASED: Technical Progress • Simulations predicted: Speed, Separation, • Flow control and # of PreConc.Elements • 1st gen. PHASED chips fabricated • Stat. film material survives 200-250ºC in air • Patterning demonstrated and • Specific surface area ~800 m2/g unaffected • Heater FET switch chips fabricated • 1st gen. electronic circuit designed & built • Millisecond desorption response time feasible =600

  9. PHASED: TC Detector Response Time PHASED TC Capability TC Sensor Length: 0.03 cm Gas Velocity: 100 cm/s Response Time: < 1 ms PHASED Output: (tR100 ms) Resolution, t½~ tR/R 3 ms Top View of Honeywell Microbridge Flow or TC Sensor Ulrich.Bonne@Honeywell.com

  10. Thermal Modeling of PHASED (cont’d) Ulrich.bonne@honeywell.com

  11. PHASED: Flow Control Ulrich.bonne@honeywell.com

  12. PHASED Layout Proposed layout of 20-Element Concentrator. Die: 7.3 x 8 mm

  13. PHASED Layout 20 Elements 100 mm Wafer robert.higashi@honeywell.com Honeywell Confidential and Proprietary

  14. 20-Element Pre-Concentrator, Diff. TC, 20-Element Separator Integrated Version of PHASED, Showing Sensors, Concentrator and Separator. robert.higashi@honeywell.com

  15. PHASED: Progress with Chip Fabrication

  16. PHASED: Progress with Chip Fabrication

  17. PHASED: PCB w/Chip-PCBs Ulrich.bonne@honeywell.com

  18. Performance Modeling of PHASED Ulrich.bonne@honeywell.com

  19. Performance Modeling of PHASED (cont’d.) Ulrich.bonne@honeywell.com

  20. Predicted Output for Air Sample Analysis

  21. Gas Chromatograph: Outputs of C1-C3 in He k’ = (tR - to) / to

  22. PHASED: Simulated Outputs for C1-C3 Gases in Air Ulrich.bonne@honeywell.com

  23. PHASED: Simulated Outputs for C1-C3 Gases in Air Ulrich.bonne@honeywell.com

  24. Status of PHASED as of Jan. ‘2003 Conclusions: • Demonstrated: PHASED-I MEMS fabrication and flow control; operational demonstration is next • Operational feasibility risk reduction: Simulations, Materials, Fabrication: 1,000-10,000:1-concentration gain, 15:1-Resolution, 3-sec, 10-ppb • Resolution:Adjust gas velocity for max. (=min. plate height) • Min. Time:Minimize film thickness w/o starving the capillary’s gasvolume MEMS Enablers  Thin-film stationary phase enhances resolution and  shortens analysis time  Thin-film substrate reduces power  MEMS enables integration GC components, multi-stage pre-con. & electr. injection Compatibility with NeSSI Challenges  Most power is consumed by column temperature ramping  Selectivity & peak ID; then pump and valve Ulrich.bonne@honeywell.com

  25. PHASED Flow Calibration

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