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Semiconductor Equipment Fire Suppression Compliance

Semiconductor Equipment Fire Suppression Compliance. for SESHA Texas Hill Country Chapter by Matt Wyman, Semiconductor Division Manager KOETTER FIRE PROTECTION INTERNATIONAL June 14, 2007. Koetter Fire Protection. Specialize in Semiconductor Equipment Fire Protection

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Semiconductor Equipment Fire Suppression Compliance

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  1. Semiconductor EquipmentFire Suppression Compliance for SESHA Texas Hill Country Chapter by Matt Wyman, Semiconductor Division Manager KOETTER FIRE PROTECTION INTERNATIONAL June 14, 2007

  2. Koetter Fire Protection • Specialize in Semiconductor Equipment Fire Protection • Global Design & Install CO2 & FWS • Bulk Control Systems for CO2 & FWS • Corrosive Applications (Combustible Plastics) • SEMI Standards Fire Protection Task Force Leader • Specialize in Equipment Design & Integration • Code Review & Compliance Consulting • NFPA/FM Standards • SEMI Standards • Semiconductor Fire Protection Training Seminars • KFP Test & Training Bench • Industry White Papers • Industry Presentations (SESHA) • 7 Texas Locations & International

  3. Overview • Are my new and/or existing fire suppression systems compliant? • “Quick” CO2 Design Review • Local Application Nozzles • CO2 Tubing • Fire Detectors • NFPA 12 2005 Changes • Bulk Systems • Hatsuta Cabinex Equipment • Fine Water Spray • Fire Suppression Submittals

  4. Fire Codes • IFC2006 • Combustible Tool >4ft. Wide • Sprinkler Head Inside or Gaseous Fire Suppression • FM DS 7-7 “Semiconductor Fabrication Facilities” • CO2 or FWS (Fine Water Spray) • CO2 is most widely utilized • Extinguish 13kW Fire • NFPA 12 “Carbon Dioxide” • SEMI S14 “Safety Guidelines for Fire Risk Assessment & Mitigation for Semiconductor Manufacturing Equipment” • SEMI S2 “Environmental, Health, & Safety Guideline for Semiconductor Manufacturing Equipment” • Chapter 14 “Fire Protection” • NFPA 318 “Protection of Semiconductor Fabrication Facilities”

  5. CO2 Design • Total Flood (TF) • Enclosed Compartments • Mini-Environments • Plenums, Head Cases, Chemical Cabinets • Reach 50% CO2 Concentration • 60 Second Discharge • Compensate CO2 Demand for: • Process Exhaust Ventilation • Damper Violates SEMI S2 • Unclosable Openings

  6. CO2 Design • Local Application (LA) • Open Compartments • Working Surfaces • Rate by Volume • “Assumed” 3D Volume • 30 Second Discharge • No Compensation for Exhaust Ventilation & Openings • Combination System (TF & LA) • Typically 30 Second Discharge

  7. Existing CO2 Systems • “Quick CO2 Review” • No Calculations • Check that Supply = Demand • Typical “Wet Bench” • Exhaust Rates = ~125cfm/linear foot (typical) • “Quick” Demand Calcs • TF Demand = 11.5% of Volume (60sec) • Volume = Dimension + Exhaust (60sec) • LA Demand = Average • (8ft = 50lbs, 6ft = 35lbs, 4ft = 20lbs)

  8. Quick CO2 Review • Example – 8’L x 4’D x 6’H Enclosed Plastic Bench-100lbs. CO2 • Total Volume (TF) = 192cuft x 11.5% = 22.1 lbs. • Exhaust Volume (TF) = 125cfm/ft x 8ft x 11.5% = 115 lbs. • Total Demand (TF) = 137 lbs. CO2 • CO2 Supply = NOT ADEQUATE • Example – 6’L x 4’D x 5’H Open Solvent Bench-100lbs CO2 • Working Surface (LA) = 35 lbs. (Typical) • Plenum Volume (TF) = 6ft x 4ft x 3ft = 72cuft x 11.5% = 8.3 lbs. • Plenum Exhaust (TF) = 125cfm/ft x 6ft x 11.5%/2 = 43.1 lbs • Total Demand = 86.4 lbs. • CO2 System = ADEQUATE

  9. Nozzle Comparisons • LA Nozzles • All have “cone” to absorb discharge pressure • Reflected discharge from orifice • Less exit velocity (same flow rate) • Nozzle absorbs most 600psi discharge pressure • TF Nozzles • “V” Nozzle is “Vent” nozzle (TF) • Straight discharge from orifice • Full effects of 600+psi discharge pressure on tool (especially baths) • Much higher velocity

  10. Local Application Nozzles • Working Surface Areas (Wet) • Cone shaped for “Soft” discharge • Cone shape provides larger 2D coverage area • Nozzles pointed downward towards back wall • Provides “rolling” effect across Working Surface Front View Side View

  11. All Local Application Nozzles Must Have Coverage Chart 2D Coverage of LA Nozzle Ansul CR D Nozzle Ansul D Nozzle Identical Nozzles FM Listing = FM testing LA Nozzle Listings/Approvals

  12. LA Nozzle Coverage • Does this apply to other manufacturers and models? • Ansul • Has Other LA Nozzles • Not for Wet Bench (different coverage chart) • Hatsuta Cabinex-EWT • Has FM Approved LA Nozzle for Wet Bench • Has Own Coverage Chart • Chemetron • Has FM Approved LA Nozzle(s) • Not for Wet Bench (different coverage chart) • Kidde • Has FM Approved LA Nozzle(s) • Not for Wet Bench - (different coverage chart) • What about Kidde “V” Nozzle for LA?

  13. Kidde “V” Nozzle • Kidde “V” Nozzle from Compliance review • 1st - Listed & Approved by UL/FM as TF Nozzle ONLY • No LA Coverage Chart in Design Manual • NOT LISTED/APPROVED FOR USE AS LA NOZZLE • 2nd - CAN CREATE A SEVERE SPLASH HAZARD • “V”=“Vent” type is designed for “high velocity” discharge to overcome exhaust ventilation. • Many documented cases where discharge splashed acid baths • Dangerous Exposure to Personnel • 3rd - Kidde began manufacturing and listing of Stainless Steel “V” nozzle in June 2005. • Previously only available in brass. • Previous SS installations were not listed/approved components • 4th - Not supported by Kidde for LA Coverage

  14. Kidde “V” Nozzle • Copy of Letter from Kidde regarding use of “V” Nozzle for LA Coverage • Dated May 26, 2006

  15. HalarCoating for Stainless Steel Nozzles, Fittings, & Tubing in Corrosive Areas SS Corrosion Protection CO2 Tubing CO2 Fittings CO2 Nozzles

  16. SS Tubing & Compression Fittings

  17. Detection • Optical Flame Detection (13kW Fire) • Solvent Areas • Corrosive Areas • High Exhaust Rate Areas • Heat Detection (155ºF) • Low Exhaust Rates – 400cfm limit • Slower Response = Tolerate Larger Fire • Linear Heat Detection (Corrosive Areas) • Cross-Zoning Flame & Heat Detectors (Asia) • Prevents “False Discharges” • But Negative Affect to Performance

  18. Flame Detectors • Infrared (IR) & Ultraviolet (UV) Sensors • UV • Quartz Window • Can be “Masked” by • Gases, Smoke, Fumes • IR • Near Band (4.3µ) • Hydrocarbon Fire • Wide Band (0.7-3.5µ) • Visible (0.4-0.7µ) • Sierra DCR1(S) • UV/IR • Cheapest • Leakage Problems • Quartz Window • HF

  19. Flame Detectors • Cabinex SX-7000 • Triple Band IR (Near) • Reliability? • Chemical Compatibility? • Det-Tronics PM-5MP • Dual Band IR (Near) • Really Fast • False Alarm Issues • Fire Sentry FS7 • Near Band, Wide Band™, & Visible IR • Hydrocarbon & Non-hydrocarbon • Alarm & Pre-Alarm Outputs • 5-sec Alarm Verification (Flash Fires) • FirePic History • Most Reliable Flame Detector!

  20. Flame Detector Reliability • False Alarm Immunity • KFP TEST • Compare Reliability of FS7 vs. PM-5MP to “Steam” • Blackbody IR Radiation • Alarm Signal (False Alarm) • 300ºF - 600ºF • 6” – 36” Distance • Det-Tronics Technical Note • Alarm from Mini Maglite @ 2” w/o window • Alarm from Maglite @ 1-3” with & w/o window • Alarm from Quartz Halogen Light @ 3ft.

  21. Spot Smoke Detectors • 2 Types • 120VAC “First Alert” Spot Smoke Detector • UL Listed as RESIDENTIAL detector • 24VDC Fire Alarm System Spot Smoke Detector • UL Listed for use with compatible “cross-listed” FACP • SEMI S2 Section 14.4.4 Fire Detection, Alarm, & Controls • 14.4.4.1&2 All detectors, alarms, and controls be accepted and listed by an accredited laboratory (example UL or FM) and installed in accordance with the terms of that acceptance and appropriate national or international standards (ex. NFPA 72) • Spot Detectors are NOT Compliant (NFPA/SEMI/UL) • Without connection to Fire Control Panel • Spot Detectors require ~2.5% obs./ft. concentration • Not effective in Exhausted or “Open” Compartments

  22. NFPA 12 2005 • NEW Changes to NFPA 12 2005 Edition • Retroactive upon AHJ • Labels must meet ANSI Z535 • Orange “Warning” Color • “Warning” Triangle Symbol • Aspiration Symbol • Outside Protected Space • At Manual Activation • SEMI S1 Compliant

  23. NFPA 12 2005 • Lockout Valves (Not Required) • Required except where personnel can’t enter space (4.3.3.6) • Where CO2 can migrate to expose personnel (4.3.3.6.1) • System should “Lockout” during maintenance or testing (4.3.3.6.3) • “Lockout” Valve should be supervised • Pressure Switch installed between Supply and Lockout Valves (4.5.4.11) • Disable/By-Pass Switch (Required) • Electrically operated systems should have service disconnect switch (4.3.3.7) • Switch should be supervised (keyed)

  24. Bulk Systems • High Pressure or Low Pressure CO2 or FWS • Large Supply of Agent to Protect Multiple Systems • Main & Reserve • Controlled Release of CO2 • Benefits • Floor Space • Controls • Tool Uptime • Life Cycle Cost • Negative • Higher Install Cost • Major Retrofit or New Fab Project

  25. Bulk CO2 Compliance • What is wrong with this design? • 40 Tools on 1 HP Manifold System • 1st - Largest FACP has maximum approval of 10 independent releasing hazards • Solution – Minimum of 4 releasing panels

  26. Bulk CO2 Design • FACP Approval/Listings • Limited to maximum of 10 independent releasing hazards • 10 Tools

  27. Bulk CO2 Compliance • Anything else? • 2nd - Location of Selector Valves • AT EACH TOOL? • Where does CO2 go? • What about phase change in pipe? • How do you Calc this? • CAN’T!!

  28. Bulk CO2 Design • Selector Valves Must Be @ CO2 Supply Location • Minimize CO2 Loss • Per Listed Hydraulic Calculation Programs

  29. Slab Horn / Strobe Light LCD80 Wet Deck Annunciator HP Manifold Configuration Deck Manual Pull Keyed By-Pass Switch STI CO2 Line Nozzle(s) Sensor(s) Owner: Tech Serv Fab Level Selector Valve(s) & Flow Switch(s) Owner: Fac Ops SLC Loop (Device Signals) Other Decks (10 max) CO2 Cylinder Bank RS485 Comms (Signal Data) Copper (Comms) Fiber Network (Comms) Valve Control Signal Manifold Control Panel Building Panel Interface Manifold Network Panel(s) Sub Fab Level

  30. HATSUTA CABINEX-EWT • FM Approved for Semiconductor Tools • September 2004 • Manufactured in Osaka, Japan • Specifically designed for Semiconductor • Total Flood & Local Application • Excellent OEM product! • Packaged cabinet for cylinder(s) & panel • Worldwide Compliance! • CABINEX-EN = NOT COMPLIANT IN USA

  31. Cabinex-EWT • Control Cabinet • Up to 2, 100lb. Cylinders • 50 & 100-lbs. • 1.8’ x 1.7’ x 7.0’ Cabinet • Integrated Panel • Up to 32 “Addressable” Inputs • Cross-Zoning Capable • Single Release Zone • Solenoid & Gas Cartridge Actuators • Popular with OEMs • TEL, DNS, AMAT

  32. Fine Water Spray (FWS) • Securiplex • Wet Bench Application • FM Approved • Extinguishing Agent • Fab DI Water (DIW) • Fab Nitrogen (N2) • Mixed at nozzle • Dual piping • Unlimited Supply • Low Pressure • PVDF or PFA Nozzles & Tubing

  33. Stamped Drawings of CO2 Mechanical & Electrical Systems including Isometric FPE or NICET Level 3 CO2 Hazard Design Demand Calculations CO2 Hydraulic Flow Calculations Power Supply & Battery Backup Calculations Bill of Material List Equipment Data Sheet Submittals Sequence of Events Acceptance Test & Certification Form Submittal Documentation

  34. CO2 Solid Modeling

  35. Questions • Any Questions? Matt Wyman Semiconductor Division Manager KOETTER FIRE PROTECTION Dallas, Texas 972.333.4965 – cell mwyman@koetterfire.com

  36. Discharge Tests • Demonstration • Mock of Open Wet Bench • 8’W x 1.6’W x 2.5’H • Recessed baths • Exhaust Ventilation • Various Discharges • Various Configurations • VIDEO

  37. Test Results • CO2 Concentrations • See Table • Analysis • All Extinguish Fire Source • IPA/PP Pan Fire • Measure CO2 concentrations at various points • Vent type nozzles had significant splashing results • Not recommended over open baths

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