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Instrumentation and Metrology for Nanofabrication

Instrumentation and Metrology for Nanofabrication. The NSF Nanomanufacturing Program Portfolio. Haris Doumanidis Mechanical & Manufacturing Engineering – University of Cyprus Tel: (357) 22892265 - Fax: (357) 22892254 - cdoumani@ucy.ac.cy.

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Instrumentation and Metrology for Nanofabrication

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  1. Instrumentation and Metrology for Nanofabrication The NSF Nanomanufacturing Program Portfolio Haris Doumanidis Mechanical & Manufacturing Engineering – University of Cyprus Tel: (357) 22892265 - Fax: (357) 22892254 - cdoumani@ucy.ac.cy

  2. * FIB micromachining and advanced characterization of carbon nanotube-metal junctions (K. Dovidenko, SUNY Albany) * Staggered probes for integrating nanomachining and metrology (R. Vallance, Univ. of Kentucky) *Nanofabrication using sub- wavelength near-field nano- optical laser processing (S. Das, Univ. of Michigan) * Novel low-cost nanolithography technique using nanometric high- transmission optical antenna (X. Xu, Purdue Univ.) FIB, Laser, CNT Emission and OpticalSurface Technologies

  3. * Nanorobotics (A. Requicha, Univ. of S. California) * Motion control platform for accurate measurement and manufacturing of nanostructures (S. Smith, UNC) * Advanced control algorithms for active materials actuators used in nanoscale positioning (S. Seelecke - N.C. State Univ.) Actuators and Controls For Nanofabrication * NanoXerography: the use of electrostatic forces to pattern nanoparticles (H. Jacobs, Univ. of Minnesota)

  4. * Manipulation and 3D organization of nanoparticles by dielectrophoresis (P. Alexandridis, SUNY Buffalo) * Spatially resolved characterization of nano-porous SiC layers (S. Ostapenko - Univ. of South Florida) * Torque spectroscopy for nanosystem characterization and fabrication (D. Cole, Duke Univ.) Sensors and Actuatorsfor Nanofabrication * Protein-based nanomotors and nanorobots (C. Mavroidis, Rutgers Univ.)

  5. * Lab-on-a-chip MEMS instruments * Positioning, registration, alignment * 2D surface mapping and 3D imaging real-time sensors & off-line metrology * Simultaneous fabrication & in-process sensing integrated into machine * Decoupling of transduced information * Model-based software observation •  Parallel probe arrays and scanned systems •  Improved resolution and bandwidth for control • Multi-scale integration: macro-MEMS-NEMS • Multi-energetic domain measurement . Nanofabrication Research Issues in Instrumentation and Metrology * Scanning probe, near-field microscopy * Electron (SEM, TEM), ion beam, * Laser tweezing, X-ray spectroscopy, NMR * Synchrotron, neutron, photon sources

  6. Research Fields for Metrology at Nanoscale • * Nanomaterials • * Nanomechanics • * Nanofluidics • * Nanoenergetics • * Nanoinformatics • * Nanocognition • * Nanocontrols • Virtual nanoenvironments • Neuron on silicon, remote AP • Nanoscale transportation • Transcription, transduction • Designer molecular blocks • Quantum manipulation/sensing • In-situ hardware control

  7. Bioinstrumentation at Nanoscale • Learning from Nature • -Biomimetic instruments • -Bioinspired measurement • Working with Nature • -Hybrid bio/abiotic structures • -Biological metrology * Material/structural diversity * Multi-functionality * Redundancy * Synergy, symbiosis * Autonomous sustainability * Adaptation to environs * Evolution and learning * Self-repair * Self-replication * End-of-life cycle

  8. * Orientation workshops for prospective graduate students * Interdisciplinary grad/postdoc fellowships/traineeships * Nanotechnology education combined to research * Integration to business and entrepreneurial leadership * Continuing and professional education courses in nanometrology, distance learning via internet . Nanoinstrumentation Education and Training of Workforce * Nanotechnology highlights in K-12 education : Center visits, guest expert lectures, curriculum etc. * Introductory nanotechnology preview minicourses * Renewed physical & biological science courses, integrated to engineering and inspired by nanotechnology context * New and revised curriculum spanning across departments * Nanoscience/nanotechnology minors (future majors?) * Nanotechnology research experiences for undergraduates and teachers * Internships in nanotechnology industry and federal laboratories * Development of course modules and multimedia materials

  9. * From discovery to prototype * New instrumentation & machines * 3-D Manufacturing tools * System integration and scale-up * Metrology, sensors and control * Teleoperation and simulation * Geographical distribution * Integration with Education * Involvement of Social Sciences * Broadening participation of public * International collaborations Building blocks Nanofabrication Processes Microelectronics Optics and Optoelectronics Materials Science Solid State Physics Nanostructure Science Micromechanics Microfluidics Quantum Structures Biophysics Chemical Sensors Polymers Environmental, energy, health & safety systems Coatings and surfaces Cornell Consolidates and composites Biodevices and systems Penn State Nano- Technology Research Stanford NNUN NSEC Howard Biochemical Dispersions & structures Photonics- Optics U.C. Santa Barbara MRSECs, STCs, ERCs, IUCRCs Processing and integration Electronic-magnetic systems System architectures Modeling tools instruments National Nanotechnology InfrastructureNetwork (NNIN)

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