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Understanding Silicon Wafer Planes and Directions

Explore the principles of electronic devices through the study of silicon wafer planes and directions. Learn Miller indices, distances between parallel planes, and angle calculations to understand the structure of electronic circuits.

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Understanding Silicon Wafer Planes and Directions

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  1. ECE 874:Physical Electronics Prof. Virginia Ayres Electrical & Computer Engineering Michigan State University ayresv@msu.edu

  2. Lecture 03, 06 Sep 12 VM Ayres, ECE874, F12

  3. Motivation: • Show order: http://www.siwafers.com/100-mm.htm • Show real wafers: plain and with circuits VM Ayres, ECE874, F12

  4. Motivation: • Wafer with circuits: pn junctions are inside the wafer, only the interconnects are on tops and bottoms: + Battery - Principles of Electronic Devices, Streetman and Bannerjee VM Ayres, ECE874, F12

  5. Motivation: Moving in <111> direction  ~ 2 eV Moving in <100> direction  only ~ 1 eV VM Ayres, ECE874, F12

  6. These are directions to planes: Moving in <111> direction  ~ 2 eV A {100} plane Moving in <100> direction  only ~ 1 eV VM Ayres, ECE874, F12

  7. These are directions to planes: Moving in <111> direction  ~ 2 eV A {111} plane Moving in <100> direction  only ~ 1 eV VM Ayres, ECE874, F12

  8. z a a x a y These are directions to planes: A {100} plane To say which {100}, need a coordinate system and an origin O. VM Ayres, ECE874, F12

  9. 1.2.5 Miller indices Ii, iii, iv VM Ayres, ECE874, F12

  10. +z a a +x a +y O VM Ayres, ECE874, F12

  11. +z a a +x a +y O VM Ayres, ECE874, F12

  12. +z a a +x a +y O VM Ayres, ECE874, F12

  13. +z a a +x a +y O VM Ayres, ECE874, F12

  14. +z a a +x a +y O VM Ayres, ECE874, F12

  15. VM Ayres, ECE874, F12

  16. +z a a -x a +y VM Ayres, ECE874, F12 O

  17. VM Ayres, ECE874, F12

  18. 6 equivalent {100} planes: VM Ayres, ECE874, F12

  19. 6 equivalent <100> directions: VM Ayres, ECE874, F12

  20. [110] VM Ayres, ECE874, F12

  21. Lecture 01, slide 19: Distance d between parallel planes: Example problem: what is the distance d between the parallel {111} planes? VM Ayres, ECE874, F12

  22. Lecture 01, slide 19: Distance d between parallel planes: Example problem: what is the distance d between the parallel {111} planes? VM Ayres, ECE874, F12

  23. Example problem:(a) find the Miller indices of the plane shown below (Fig. 1.7 (a))(b) find the distance d between its parallel planes VM Ayres, ECE874, F12

  24. (a) (b) VM Ayres, ECE874, F12

  25. [110] VM Ayres, ECE874, F12

  26. Example problem:(a) find the angle q between the [111] and [001] directions (b) find the angle q between the [111] and [110] directions(c) find the angle q between the [111] and [362] directions(d) find the angle q between the [111] and [001bar] directions VM Ayres, ECE874, F12

  27. (a) VM Ayres, ECE874, F12

  28. (b) VM Ayres, ECE874, F12

  29. (c) VM Ayres, ECE874, F12

  30. (d) VM Ayres, ECE874, F12

  31. Example problem: the surface of a Si wafer is a (001) plane. Which, if any <110> directions are perpendicular to the Si wafer (001) plane direction? VM Ayres, ECE874, F12

  32. VM Ayres, ECE874, F12

  33. VM Ayres, ECE874, F12

  34. VM Ayres, ECE874, F12

  35. VM Ayres, ECE874, F12

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