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Fundamentals and Applications of Vacuum Microelectronics

Fundamentals and Applications of Vacuum Microelectronics. Zhuowen Sun EE 698A. Outline. Introduction Field emission basics Spindt emitters and arrays Beyond Spindt emitters Field emission display Summary. Introduction (I). What is vacuum microelectronics . [Ref. 1]. [Ref. 1].

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Fundamentals and Applications of Vacuum Microelectronics

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  1. Fundamentals and Applications of Vacuum Microelectronics Zhuowen Sun EE 698A

  2. Outline • Introduction • Field emission basics • Spindt emitters and arrays • Beyond Spindt emitters • Field emission display • Summary

  3. Introduction (I) • What is vacuum microelectronics [Ref. 1] [Ref. 1]

  4. Introduction (II) • Good • Power handling ability • Ballistic and coherent transport • Resistance to radiation-induced defects • Bad • Fabrication difficulties • Packaging issues

  5. Field emission basics F-N equation [Ref. 2]

  6. Spindt emitters and arrays (I) Assuming field emission onset E ~ 1x107 V/cm Classical processing: R = 1mm , r = 2000Å β = 5x104 / k cm-1  V = 1000 V Micro-fabrication: R = 5000Å, r = 250Å β = 4x105 / k cm-1  V = 100 V E = β V E: electric field ( V/m) V: applied voltage (V) β = R / (k r ( R – r )) ~ 1/ (k r ) when r << R [Ref . 3] k: const. 1 < k < 5

  7. Spindt emitters and arrays (II) [Ref. 3]

  8. Spindt emitters and arrays (III) • Fields of a triode structure [Ref. 4]

  9. Spindt emitters and arrays (IV) • Structure parameter dependence [Ref. 5]

  10. Spindt emitters and arrays (V) [Ref . 3] Before: ΔΦ = 1 eV Σ ~ 0.1% After: ΔΦ = 0.2 eV Σ ~ 20-40% [Ref . 6]

  11. Beyond Spindt emitters (I) • Problems with simple Spindt emitters • Contamination • Focusing • Uniformity of array fabrication • Power consumption

  12. Beyond Spindt emitters (II) • Solutions • Metal-Insulator-Metal (MIM) emitters • Surface Conduction Emitters (SCE) • Diamond-coated emitters • Carbon nanotube emitters

  13. Field emission display (I) [Ref. 8] [Ref. 7]

  14. Field emission display (II) • Large array [Ref. 9] • Beam focusing [Ref. 3]

  15. Field emission display (III) • Spacers breakdown [Ref. 3] • Getters [Ref. 3]

  16. Field emission display (IV) [Ref. 3]

  17. Field emission display (V) [Ref. 3]

  18. Summary • An interesting device family • Special design/fabrication considerations • Complementary to conventional solid-state devices • Important applications

  19. References [1] C. A. Spindt et al., J. Appl. Phys., 47 (1976) 5284 [2] F. Charbonnier, Appl. Surf. Sci., 94/95 (1996) 26 [3] W. Zhu, Vacuum Microelectronics, John Wiley & Sons, 2001 [4] W.Dawson et al., J. Vac. Sci. Tech. B, 11(2),(1993) 518 [5] E. G. Zaidman, Trans. Electron Dev., May 1993, 1009-1016 [6] K. L. Jensen, Naval Res. Lab.: Cathode Workshop, 2001 [7] http://www.pctechguide.com/07panels.htm [8] T. S. Fahlen, Proc. IVMC, 1999, p. 56 [9] T. T. Doan et al., US patent 5229331, 1993

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