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A Study of Lubricating Flows in MEMS Bearings

A Study of Lubricating Flows in MEMS Bearings. J. Streeter 1 E. Gutierez-Miravete 2 1 Optiwind 2 Rensselaer at Hartford COMSOL09. EFAB Manufacturing Process. First Structural Layer Completed First Layer Completed Bearing Surface.

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A Study of Lubricating Flows in MEMS Bearings

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  1. A Study of Lubricating Flows in MEMS Bearings J. Streeter1 E. Gutierez-Miravete2 1Optiwind 2Rensselaer at Hartford COMSOL09

  2. EFAB Manufacturing Process First Structural Layer Completed First Layer Completed Bearing Surface Un-etched Assembly Etched Assembly Sample Assembly

  3. Governing Equations • Mass Conservation (Continuity) div V = 0 • Momentum Conservation (Navier-Stokes) V grad V = m div grad V - grad p + r g

  4. Journal Bearing 0 Offset 30 Offset 45 Offset The journal bearing produces the same pressure differential regardless of the shaft offset.

  5. Channel Bearing 4-Lobe 0 Offset 4-Lobe 45 Offset 6-Lobe 0 Offset 6-Lobe 30 Offset

  6. Diffuser Bearing 4-Lobe 0 Offset 4-Lobe 45 Offset 6-Lobe 0 Offset 6-Lobe 30 Offset

  7. Nozzle Bearing 4-Lobe 0 Offset 4-Lobe 45 Offset 6-Lobe 0 Offset 6-Lobe 30 Offset

  8. Computed Pressure Differentials

  9. Conclusions • This study has demonstrated that COMSOL can be used to demonstrate the hydrodynamic performance of proposed MEMS designs. • Specific features of bearing design determine the resulting flow field and pressure distribution in the hydrodynamic gap. • Significant peak pressure reductions are possible by using multiple lobe diffuser-type MEMS configurations

  10. Questions?

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