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Precision Annealing and Oxidation Process Parameters for Optimal Results

Learn about the standard process parameters for annealing and oxidation, including temperature, time, pressure, gas types, and rotation speed to achieve high-quality results in material processing.

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Precision Annealing and Oxidation Process Parameters for Optimal Results

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  1. 標準製程 • Annealing • Temperature:600~1150℃ • Time:5~300 sec • Pressure:5~760 torr • Gas:N2、O2 • Rotate:60~90 rpm • Oxidation • Temperature:600~1150 ℃ • Time:10~300 sec • Pressure:5~760 torr • Gas:O2 • Rotation:60~90 rpm

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